Hyperbolic quadrupole mass filter made of platinum group metal coated quartz tube

Abstract

The present invention relates to a quadrupole mass analyzer which is a core equipment of a majority of mass analyzer, particularly to a quadrupole mass analyzer with a hyperbolic surface made of quartz which is capable of enhancing resolving power and analytical performance of a mass analyzer. The quadrupole mass analyzer according to the present invention includes four quartz tubes separated by predetermined distance to form a shape of rotation symmetry and being parallel to each other; an electric part formed with a predetermined area by a platinum membrane being divided into a prefilter electrode part and a main filter electrode part in a longitudinal direction of the quartz tube in a circumferential surface in an axial direction of the rotation symmetry of the quartz tube, a cross-section of the platinum membrane on an opposing quartz tube forming a substantial hyperbolic surface; a quartz pin being chamfered at both ends in a shape with a same radius curvature as the quartz tube and being closely fixed between the adjacent quartz tubes; and an electrically conductive connection member electrically connecting each of prefilter electrode parts and main filter parts of the opposing quartz tubes so as to apply RF and DC electric source.

Dependencies are inferred from the claim text.