Radiation-resistant zone plates and method of manufacturing thereof

Abstract

Disclosed are radiation-resistant zone plates for use in laser-produced plasma (LPP) devices, and methods of manufacturing such zone plates. In one aspect, a method of manufacturing a zone plate provides for forming a masking layer over a supporting membrane, and creating openings through the masking layer in a diffractive grating pattern. Such a method also provides depositing radiation absorbent material in the openings in the masking layer and on the supporting membrane, and then stripping the remaining portions of the masking layer. Then, portions of the supporting membrane not covered by the absorbent material are removed, wherein the remaining portions of the supporting membrane covered by the absorbent material form separate grates. Also in such methods, cross-members are coupled to the grates for holding positions of the grates with respect to each other.

Dependencies are inferred from the claim text.