Embedded metal heat sink for semiconductor device and method for manufacturing the same
AssigneeNational Cheng Kung University
InventorsYan-Kuin Su, Kuan-Chun Chen, Chun-Liang Lin, Jin-Quan Huang, Shu-Kai Hu
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AssigneeNational Cheng Kung University
InventorsYan-Kuin Su, Kuan-Chun Chen, Chun-Liang Lin, Jin-Quan Huang, Shu-Kai Hu
Estimating the term…
An embedded metal heat sink for a semiconductor device and a method for manufacturing the same are described. The embedded metal heat sink for a semiconductor device comprises a metal thin layer, a metal heat sink and two bonding pads. The metal thin layer including a first surface and a second surface on opposite sides, wherein at least one semiconductor device is embedded in the first surface of the metal thin layer, and the semiconductor device has two electrodes with different conductivity types. The metal heat sink is deposited on the second surface of the metal thin layer. The bonding pads are deposed on the first surface of the metal thin layer around the semiconductor device and are respectively corresponding to the electrodes, wherein the electrodes are electrically and respectively connected to the corresponding bonding pads by at least two wires, and the bonding pads are electrically connected to an outer circuit.
A method for manufacturing an embedded metal heat sink for a semiconductor device, comprising:
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