Solid-state imaging device, camera and method of producing the solid-state imaging device

A method of producing a solid-state imaging device comprising the steps of:

• forming a structure including (a) a substrate having a gettering layer thereon and having a first impurity with a first concentration, (b) a first conductive type epitaxial layer and (c) a first conductive type impurity layer stacked on one another in that order,
• said first conductive type epitaxial layer being formed on the substrate including the gettering layer, and
• said first conductive type impurity layer being formed in a boundary region including a boundary of said substrate and said epitaxial layer, a part of said substrate facing the boundary and a part of said first conductive type epitaxial layer facing the boundary having a second impurity with a second concentration higher than that of the first impurity concentration;
• forming in said epitaxial layer a second conductive type region capable of storing in said epitaxial layer a charge generated by a photoelectric conversion;
• forming an interconnection layer on said epitaxial layer;
• and
• removing said substrate.