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US 7,452,713 B2Granted
Process for manufacturing a microfluidic device with buried channels
AssigneeSTMicroelectronics S.r.l.
InventorsGabriele Barlocchi, Pietro Corona, Ubaldo Mastromatteo, Flavio Villa
Life of this patent
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Abstract
A process for manufacturing a microfluidic device, including the steps of: forming at least one channel in a semiconductor material body; forming a dielectric diaphragm above the channel, for closing the channel; and forming heating elements for providing thermal energy inside the channel. The heating elements are formed directly on said dielectric diaphragm.
Claims18
A process for manufacturing a microfluidic device, comprising the steps of:
- forming at least one channel in a semiconductor material body;
- forming a dielectric diaphragm above said channel, for closing said channel;
- and
- forming heating elements, temperature sensors and an array of electrodes for providing thermal energy inside said channel and control thereof;
- wherein said heating elements, temperature sensors and an array of electrodes are formed directly on said dielectric diaphragm.
2 more elements
A microfluidic device, comprising:
- a) at least one channel buried in a semiconductor material body:
- b) a dielectric diaphragm above said channel, for closing said channel;
- and
- c) heating elements, temperature sensors and an array of electrodes for providing and controlling thermal energy inside said channel, wherein said heating elements, temperature sensors and an array of electrodes are directly formed on said dielectric diaphragm, said array of electrodes being arranged at one end of said channel.
1 more element
A method of analyzing a biological sample, comprising
- applying a biological sample to microfluidic device comprising at least one channel buried in a semiconductor material body, a dielectric diaphragm above said channel for closing said channel, and heating elements, temperature sensors and an array of electrodes for providing thermal energy to said channel and control thereof, wherein said heating elements, temperature sensors and an array of electrodes are arranged directly on said dielectric diaphragm;
- and
- analyzing a molecule in said biological sample.
Dependencies are inferred from the claim text.