Method of increasing the area of a useful layer of material transferred onto a support
AssigneeS.O.I. Tec Silicon on Insulator Technologies
InventorChristophe Maleville
Life of this patent
Estimating the term…
Abstract
A composite structure in accordance with the invention includes front faces of first and second substrates that are molecularly bonded to each other, wherein the dimensions of the second substrate outline are larger than the first substrate outline. The front faces are molecularly bonded such that the outline of the first front face is disposed at least partially within the outline of the second front face. A peripheral ring extends around the first front face and facing the first substrate, in which bonding between the front faces is weak or absent, and has a maximum width of less than about 0.5 mm.
Claims16
A composite structure, comprising:
- a first substrate having a first front face that ends at a first outline and a first chamfered face that begins at the first outline and is peripherally positioned about the first front face;
- and
- a second substrate having a second front face that ends at a second outline of dimensions larger than the first outline;
- wherein the first and second front faces are molecularly bonded to each other with the first outline disposed at least partially within the second outline in an area of overlap, such that a peripheral ring extending around the first front face within the area of overlap in which bonding between the front faces is weak or absent has a maximum width of less than 0.5 mm;
- and
- wherein the first substrate includes a further chamfered face peripherally positioned about the first chamfered face and the second substrate includes a further chamfered face peripherally positioned about the second front face wherein the further chamfered faces do not contact each other.
A composite structure comprising:
- a first substrate having a first front face that ends at a first outline;
- and
- a second substrate having a second front face that ends at a second outline of dimensions larger than the first outline;
- wherein the first and second front faces are molecularly bonded to each other with the first outline disposed at least partially within the second outline in an area of overlap, such that a peripheral ring extending around the first front face within the area of overlap in which bonding between the front faces is weak or absent has a maximum width of less than 0.5 mm, and the first substrate comprises a first primary chamfer extending around the first front face from the first outline and the primary chamfer is at least partially disposed within the second outline when the first and second substrates are bonded together;
- and
- wherein the first substrate includes a further chamfered face peripherally positioned about the first primary chamfer and the second substrate includes a further chamfered face peripherally positioned about the second front face wherein the further chamfered faces do not contact each other.
A composite structure comprising:
- a first substrate having a first substantially flat front face that ends at a first outline and a first chamfered face that begins at the first outline and is peripherally positioned about the first front face;
- and
- a second substrate having a second substantially flat front face that ends at a second outline of dimensions larger than the first outline and a second chamfered face that begins at the second outline and is peripherally positioned about the second flat first front face;
- wherein the first and second faces are molecularly bonded to each other with the first chamfered face of the first flat front face disposed completely within the second outline of the second flat front face so that the first chamfered face does not contact the second chamfered face;
- and
- wherein the first substrate includes a further chamfered face peripherally positioned about the first chamfered face and the second substrate includes a further chamfered face peripherally positioned about the second chamfered face wherein the further chamfered faces do not contact each other.
Dependencies are inferred from the claim text.