Probe-based lithography utilizing thermomechanically activated polymers

A method of probe-based lithography, comprising:

• depositing a preceramic polymer on a substrate;
• writing nanoscale features in the preceramic polymer by locally transforming the preceramic polymer via a chemical reaction causing it to undergo a permanent phase change into a hardened ceramic material, wherein the chemical reaction is activated by heat and/or pressure applied by a nanoscale probe tip;
• then depositing new layers of preceramic polymer and repeating the writing on the new layers to form to a desired three-dimensional ceramic electrically conductive pattern;
• treating the deposited layers by (a) removing unactivated preceramic polymer utilizing a removal solvent, or (b) cross-linking unactivated preceramic polymer to act as a support medium that isolates a formed ceramic structure both mechanically and electrically;
• and
• wherein the ceramic pattern is made electrically conductive either by (a) incorporating dopant elements into or onto the preceramic polymer, or (b) performing the writing step in a chemically-active atmosphere that supplies dopant atoms during the chemical reaction.