Method of manufacturing substrate for ink jet recording head and method of manufacturing recording head using substrate manufactured by this method

A method of manufacturing an ink jet recording head having a discharge port to discharge ink and thermal energy generating means which is provided to serve the discharge port and generates thermal energy used in discharging ink, the thermal energy generating means having a pair of electrodes disposed on a surface of an insulative layer and having a gap therebetween and a heat generating resistive layer for covering the pair of electrodes and the gap, said method comprising:

• forming an electrode layer on the insulative layer;
• removing a portion of the electrode layer in which the gap is formed by etching;
• forming a recess in a surface portion of the insulative layer by etching the surface portion of the insulative layer corresponding to the gap;
• and
• forming a liquid path for discharging ink through the discharge port by thermal energy from the thermal energy generating means.

A method of manufacturing an ink jet recording head having a discharge port to discharge ink and thermal energy generating means which is provided to serve the discharge port and generates thermal energy used for discharging ink, the thermal energy generating means having a pair of electrodes disposed on a surface of an insulative layer having a gap therebetween and a heat generating resistive layer for covering the electrodes and the gap, said method comprising:

• forming an electrode layer on the insulative layer;
• etching the electrode layer to form the gap and a surface portion of the insulative layer to form a recess corresponding to the gap;
• and
• forming a liquid path for discharging ink through the discharge port by thermal energy from the thermal energy generating means.

A method of manufacturing a substrate for an ink jet recording head, comprising:

• providing a substrate having an insulative layer formed thereon;
• forming an electrode layer on the insulative layer;
• and
• etching the electrode layer to form a gap corresponding to a thermal energy generating portion for generating thermal energy used for discharging ink and a surface portion of the insulative layer to form a recess corresponding to the gap.

A method of manufacturing an ink jet recording head having a discharge port to discharge ink and thermal energy generating means which is provided to serve the discharge port and generates thermal energy used for discharging ink, the thermal energy generating means having a pair of electrodes disposed on a surface of an insulative layer and having a gap therebetween and a heat generating resistive layer for covering the electrodes and the gap, said method comprising:

• providing a substrate having the insulative layer formed thereon;
• forming an electrode layer on the insulative layer;
• etching the electrode layer to form the gap corresponding to the thermal energy generating means for generating the thermal energy used for discharging the ink and a surface portion of the insulative layer to form a recess corresponding to the gap;
• forming the heat generating resistive layer for covering the electrode layer and the gap;
• and
• forming a liquid path for discharging the ink through the discharge port by the thermal energy from the thermal energy generating means.