System and method for producing bubble free liquids for nanometer scale semiconductor processing
AssigneeLam Research Corporation
InventorsJeffrey J. Farber, Carl Woods
Life of this patent
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Abstract
A system for producing bubble free liquid includes a continuous liquid source and a de-bubbling chamber. The de-bubbling chamber includes an outlet and an inlet. The inlet coupled to an outlet of the continuous liquid source by a supply pipe. The de-bubbling chamber also includes at least one port in a sidewall of the de-bubbling chamber. The at least one port being at least a length L from the inlet of the de-bubbling chamber. A method for producing bubble free liquid is also described.
Claims23
A system for producing bubble free liquid comprising:
- a continuous liquid source;
- and
- a de-bubbling chamber including:
- an inlet coupled to an outlet of the continuous liquid source by a supply pipe;
- an outlet;
- and
- at least one port in a sidewall of the de-bubbling chamber, the at least
- one port being at least a length L from the inlet of the de-bubbling chamber.
A system for producing bubble free liquid comprising:
- a continuous liquid source including a heater, a holding tank and a continuous-type pump;
- and
- a de-bubbling chamber including:
- an inlet coupled to an outlet of the continuous liquid source by a supply pipe;
- an outlet including a back-pressure device and wherein the outlet is coupled to an inlet of the continuous liquid source;
- and
- at least one port in a sidewall of the de-bubbling chamber, the at least one port being at least a length L equal to at least 10 diameters of the de-bubbling chamber from the inlet of the de-bubbling chamber and wherein the at least one port is coupled to a cooler.
A method of de-bubbling a liquid comprising:
- providing a continuous flow of liquid through a de-bubbling chamber, the de-bubbling chamber including:
- an inlet coupled to an outlet of the continuous liquid source by a supply pipe;
- an outlet;
- and
- at least one port in a sidewall of the de-bubbling chamber, the at least one port being at least a length L from the inlet of the de-bubbling chamber;
- and
- drawing substantially bubble free liquid from the at least one port in the sidewall of the de-bubbling chamber.
Dependencies are inferred from the claim text.