MEMS sensor driving device, MEMS sensor driving method, and active sensor using MEMS
AssigneeSony Corporation
InventorsKazuhiro Matsuhisa, Koji Fukumoto, Masaya Nagata, Atsuhito Yasui
Life of this patent
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Abstract
A MEMS sensor driving device drives a MEMS sensor including a supporter provided on a surface of a substrate, an elastic member having one end connected to the supporter, and an oscillator which is supported by another end of the elastic member in a suspended state over the surface of the substrate and which is displaceable for the substrate. The MEMS sensor driving device includes a detecting unit for detecting an oscillation of the oscillator, and a feedback unit for amplifying a signal representing the oscillation detected by the detecting unit and inputting the amplified signal as a driving signal to the MEMS sensor.
Claims8
A microelectromechanical system sensor driving device for driving a microelectromechanical system sensor including an oscillator the microelectromechanical system sensor driving device comprising:
- a detecting unit for detecting an oscillation of the oscillator;
- and
- a feedback unit for amplifying a signal representing the oscillation detected by the detecting unit and inputting the amplified signal as a driving signal to the microelectromechanical system sensor,
- wherein,
- the microelectromechanical system sensor includes a supporter provided on a surface of a substrate, an elastic member having one end connected to the supporter, such that the oscillator is supported by another end of the elastic member in a suspended state over the surface of the substrate and displaceable relatively to the substrate, and a driving electrode connected to the supporter via the elastic member for electromagnetically driving the oscillator.
A microelectromechanical system sensor driving method for driving a microelectromechanical system sensor including an oscillator, the microelectromechanical system sensor driving method comprising the steps of:
- detecting an oscillation of the oscillator;
- and
- amplifying a signal representing the detected oscillation and inputting the amplified signal as a driving signal to the microelectromechanical system sensors,
- wherein
- the microelectromechanical system sensor includes a supporter provided on a surface of a substrate, an elastic member having one end connected to the supporter, such that the oscillator is supported by another end of the elastic member in a suspended state over the surface of the substrate and displaceable relatively to the substrate, and a driving electrode connected to the supporter via the elastic member for electromagnetically driving the oscillator.
An active sensor comprising:
- a microelectromechanical system sensor including a supporter provided on a surface of a substrate, an elastic member having one end connected to the supporter, an oscillator supported by another end of the elastic member in a suspended state over the surface of the substrate, the oscillator being displaceable for the substrate, and a driving electrode connected to the supporter via the elastic member for electromagnetically driving the oscillator;
- and
- a driving unit for detecting an oscillation of the oscillator, amplifying a signal representing the detected oscillation, and inputting the amplified signal as a driving signal to the microelectromechanical system sensor.
A microelectromechanical system sensor driving device for driving a microelectromechanical system sensor including an oscillator, the microelectromechanical system sensor driving device comprising:
- a detecting unit detecting an oscillation of the oscillator;
- and
- a feedback unit performing amplification of a signal representing the oscillation detected by the detecting unit and input of the amplified signal as a driving signal to the microelectromechanical system sensors,
- wherein
- the microelectromechanical system sensor includes a supporter provided on a surface of a substrate, an elastic member having one end connected to the supporter, such that the oscillator is supported by another end of the elastic member in a suspended state over the surface of the substrate and displaceable relatively to the substrate, and a driving electrode connected to the supporter via the elastic member for electromagnetically driving the oscillator.
An active sensor comprising:
- a microelectromechanical system sensor including a supporter provided on a surface of a substrate, an elastic member having one end connected to the supporter, an oscillator supported by another end of the elastic member in a suspended state over the surface of the substrate, the oscillator being displaceable for the substrate, and a driving electrode connected to the supporter via the elastic member for electromagnetically driving the oscillator;
- and
- a driving unit performing detection of an oscillation of the oscillator, amplification of a signal representing the detected oscillation, and input of the amplified signal as a driving signal to the microelectromechanical system sensor.
Dependencies are inferred from the claim text.