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US 7,451,646 B2Granted
Device and method for resonant high-speed microscopic impedance probe
AssigneeThe Regents of the University of California
InventorsAndrew N. Cleland, Hyongsok T. Soh
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Abstract
A resonant high-speed microscopic impedance probe useful for small scale impedance measurements and/or cell and particle counting.
Claims21
A device capable of measuring impedance variances in a small region comprising:
- a probe electrode separated by one or more non-conducting regions from one or more shield electrodes;
- a detecting end of said probe electrode that can be placed in close proximity to said small region;
- an inductor L operatively connected to said probe electrode and to a transmission conductor connecting to measurement electronics;
- a signal generator for generating a radiofrequency signal;
- and
- impedance measurement electronics able to measure a reflected signal and thereby determine impedance variances at said functional end.
3 more elements
A method for measuring impedance variations in a small volume comprising:
- placing a microfabricated probe with a detecting end in proximity to said volume;
- and
- using a tank circuit to couple said microfabricated probe to radiofrequency circuitry;
- and impedance measurement electronics able to measure a reflected signal and thereby determine impedance variances at said functional end of said microfabricated probe.
1 more element
Dependencies are inferred from the claim text.