US 7,451,596 B2Granted

Multiple degree of freedom micro electro-mechanical system positioner and actuator

AssigneeMassachusetts Institute of Technology

InventorsMartin L. Culpepper, Shih-Chi Chen

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Abstract

A micro electro-mechanical system (MEMS) positioner, including an actuator and method for making the same, includes a stage formed within a first layer of semiconductor material, along with a series of beams, flexure hinges and controlled input thermal actuators. The actuators are operatively engaged with a second layer, and are selectively actuatable to effect longitudinal expansion thereof, so that relative actuation between individual ones of actuators spaced in the planar direction relative to one another is configured to generate controlled movement of the stage within the planar direction, and relative actuation between individual ones of actuators spaced orthogonally to the planar direction relative to one another is configured to generate controlled movement of the stage out of the planar direction. The relative position between the stage and the support is adjustable in each of six degrees of freedom, so that the compliant mechanism forms a quasi-static precision manipulator.

Claims48

Dependent claims

A micro electro-mechanical system (MEMS) positioner comprising:

a first stage extending in a planar direction within a first layer of semiconductor material;
a plurality of first beams extending in the planar direction within said first layer;
a plurality of first flexure hinges disposed within said first layer, coupled to said stage and to said beams;
a plurality of first controlled input thermal actuators extending longitudinally within said first planar layer;
said first actuators being coupled to said first beams at spaced locations thereon;
a second stage extending in a planar direction within a second layer of semiconductor material;
a plurality of second beams extending in the planar direction within said second layer;
a plurality of second flexure hinges disposed within said second layer, coupled to said second stage and to said second beams;
a plurality of second controlled input thermal actuators extending longitudinally within said second planar layer;
said second actuators being coupled to said second beams at spaced locations thereon;
said first layer being superposed with said second layer;
said first layer and said second layer being coupled to one another by an intermediary layer;
said intermediary layer extending intermittently in the planar direction, wherein said first and second layers are coupled to one another at spaced locations thereon;
each of said first and second actuators being selectively actuatable to effect longitudinal expansion thereof;
wherein relative actuation between individual ones of actuators spaced in said planar direction relative to one another is configured to generate controlled movement of said stage within the planar direction;
wherein relative actuation between individual ones of actuators spaced orthogonally to said planar direction relative to one another is configured to generate controlled movement of said stage out of the planar direction;
the relative position between said stage and said support being adjustable in each of six degrees of freedom;
wherein said compliant mechanism forms a quasi-static precision manipulator.

15 more elements

A micro electro-mechanical system (MEMS) positioner comprising:

a stage extending in a planar direction;
at least one beam extending in the planar direction;
a plurality of flexure hinges coupled to said stage and to said beams;
a plurality of controlled input thermal actuators extending longitudinally within a first planar layer;
said actuators being coupled to said at least one beam at spaced locations thereon;
a plurality of members extending longitudinally within a second planar layer;
said members being coupled to said beam at spaced locations thereon;
said first layer being superposed with said second layer;
each of said actuators being selectively actuatable to effect longitudinal expansion thereof;
wherein actuation of said actuators is configured to generate controlled movement of said stage out of the planar direction;
wherein said compliant mechanism forms a quasi-static precision manipulator.

8 more elements

Dependencies are inferred from the claim text.

Facts

Application: 11/037,866Filed 18 Jan 2005
Published: US 2006/0156722 A120 Jul 2006
Granted: 18 Nov 2008
Term ends: Not estimatedThe source records don’t support an estimate.

Classification9 codes

H02N 10/00
Electric motors using thermal effects
F03G 7/06
Mechanical-power-producing mechanisms, not otherwise provided for or using energy sources not otherwise provided for: using expansion or…
F03G 7/06114
Characterised by the actuating element: using the thermal expansion or contraction of solid materials
F03G 7/0616
Characterised by the actuating element: characterised by the material or the manufacturing process, e.g. the assembly