Variable capacitor and manufacturing method thereof

A variable capacitor comprising:

• movable electrodes that can be moved in the direction toward each other;
• a plurality of piezoelectric actuators that drive said movable electrodes;
• and
• a voltage application unit for applying voltage between said movable electrodes;
• wherein
• when said movable electrodes have been driven close to each other by said piezoelectric actuators, said voltage application unit applies voltage between said movable electrodes.

A method for manufacturing a variable capacitor having movable electrodes that are driven by piezoelectric actuators, comprising:

• a process of forming a plurality of said piezoelectric actuators on a substrate;
• a process o forming movable elecrodes having first electrode sections and second electrode sections on said substrate;
• a process of forming a sacrificial layer for forming a space between said movable electrodes;
• a removal process of removing said sacrificial layer;
• and
• a separation process of cutting and separating the sections except the end sections of said plurality of piezoelectric actuators and end sections of the first electrode sections of said movable electrodes from said substrate.

A method for manufacturing a variable capacitor having movable electrodes that are driven by piezoelectric actuators, comprising:

• a process of forming a plurality of said piezoelectric actuators on a substrate;
• a process of forming movable electrodes having first electrode sections and second electrode sections on said substrate;
• a process of forming a dielectric layer between said movable electrodes;
• a process of forming a sacrificial layer for forming a space between at least one of said movable electrodes and said dielectric layer;
• a removal process of removing said sacrificial layer;
• and
• a separation process of cutting and separating the sections except the end sections of said plurality of piezoelectric actuators and end sections of the first electrode sections of said movable electrodes from said substrate.