Hetero-junction electron emitter with Group III nitride and activated alkali halide
AssigneeApplied Materials, Inc.
InventorsJuan Ramon Maldonado, Francisco J. Machuca, Steven T. Coyle
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Abstract
A photocathode is capable of generating an electron beam from incident light. The photocathode comprises a light permeable support having a light receiving surface and an opposing surface. A Group III nitride layer is provided on the opposing surface of the support. The Group III nitride layer comprises at least one Group III element and nitrogen. An alkali halide layer is provided on the Group III nitride layer. The alkali halide can be a cesium halide, such as cesium bromide or iodide.
Claims22
A photocathode capable of generating an electron beam from incident light, the photocathode comprising:
- (a) a light permeable support having a light receiving surface and an opposing surface;
- (b) a Group III nitride layer on the opposing surface of the support, the Group III nitride layer comprising at least one Group III element and nitrogen;
- and
- (c) an alkali halide layer on the Group III nitride layer.
A method of generating an electron pattern the method comprising:
- (a) providing a photocathode comprising:
- (1) a light permeable support having a light receiving surface and an opposing surface;
- (2) a Group III nitride layer on the opposing surface of the support, the Group III nitride layer comprising at least one Group III element and nitrogen;
- and
- (3) an alkali halide layer on the Group III nitride layer;
- (b) directing light onto the light receiving surface of the support at a wavelength selected to cause electrons to be emitted from the photocathode;
- (c) modulating the light or emitted electrons according to a pattern to form a plurality of modulated electron beams;
- and
- (d) directing the modulated electron beams onto a surface of a substrate.
Dependencies are inferred from the claim text.