Damascene process for fabricating poles in recording heads
AssigneeWestern Digital (Fremont), LLC
InventorsKi Sup Chung, Kyusik Sin, Danning Yang, Yingjian Chen, Brant Nease
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Abstract
A method and system for manufacturing a pole for a magnetic recording head. The method and system include providing an insulator and fabricating at least one hard mask on the insulator. The at least one hard mask has an aperture therein. The method and system also include removing a portion of the insulator to form a trench within the insulator. The trench is formed under the aperture. The method and system further include depositing at least one ferromagnetic material. The pole includes a portion of the ferromagnetic material within the trench.
Claims2
A method for manufacturing a pole for a magnetic recording head comprising:
- providing an insulator;
- fabricating at least one hard mask on the insulator, the at least one hard mask having an aperture therein;
- removing a portion of the insulator to form a trench within the insulator, the trench being formed under the aperture;
- depositing at least one ferromagnetic material, the pole including a portion of the ferromagnetic material within the trench;
- and
- performing a chemical mechanical planarization on the at least one ferromagnetic material
- wherein the performing the chemical mechanical planarization further includes:
- utilizing a portion of the at least one hard mask as a stop for the chemical mechanical planarization.
Dependencies are inferred from the claim text.