Air bridge structures and methods of making and using air bridge structures
AssigneeFormFactor, Inc.
InventorGaetan L. Mathieu
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Abstract
A probe card assembly, according to some embodiments of the invention, can comprise a tester interface configured to make electrical connections with a test controller, a plurality of electrically conductive probes disposed to contact terminals of an electronic device to be tested, and a plurality of electrically conductive data paths connecting the tester interface and the probes. At least one of the data paths can comprise an air bridge structure trace comprising an electrically conductive trace spaced away from an electrically conductive plate by a plurality of pylons.
Claims11
A method of making an air bridge structure trace comprising:
- providing a substrate comprising an electrically conductive plate;
- depositing a plurality of layers of droplets onto the substrate, the droplets comprising:
- droplets of a first material disposed to form a plurality of pylons on the plate, droplets of a second material disposed to fill spaces between the pylons, and
- droplets of a third material disposed to form an electrically conductive outer seed layer;
- electrodepositing a conductive material onto the seed layer;
- and
- removing the droplets of the second material.
Dependencies are inferred from the claim text.