Integrated electrical and optical sensor for biomolecule analysis with single molecule sensitivity

An optical waveguide generally structured as an anti-resonant reflecting optical waveguide (ARROW), comprising:

• a substrate and multiple layers of solid state material disposed on the substrate, and a non-solid core extending through at least one of the multiple layers, wherein the non-solid core has an index of refraction which is lower than the index of refraction of the surrounding solid-state material, and wherein light can be transmitted with low loss through the non-solid core;
• a Fabry-Perot reflector adjacent to the non-solid core, for substantially preventing light from leaking out of the core in a transverse direction;
• a perpendicular waveguide portion for use in injecting light into the non-solid core for measuring fluorescence characteristics associated with the sample material;
• a sample-injection port in fluid communication with the non-solid core for injecting a sample fluid into the non-solid core, the sample injection port being oriented substantially perpendicular with respect to a longitudinal axis of the non-solid core;
• and
• an electrical control component in fluid communication with the non-solid core to control movement of an analyte in the sample fluid through the non-solid core.

A measurement system, comprising:

• an optical waveguide comprising a channel surrounded by a solid-state material, including a Fabry-Perot reflector adjacent to the channel, whereby light is substantially prevented from leaking out of the channel in a transverse direction;
• a perpendicular waveguide portion for use in injecting light into the channel;
• means for injecting into the channel an analyte in a sample fluid;
• an electrical component in fluid communication with the non-solid core to control movement of the analyte through the non-solid core;
• and
• means for measuring selected optical and electrical properties associated with the analyte in the sample.

A system for making parallel optical and electrical measurements, comprising:

• an optical waveguide comprising a generally planar solid-state material and a plurality of parallel channels within the solid-state material, including a Fabry-Perot reflector adjacent to each channel, whereby light injected into the channels is substantially prevented from leaking out of the channels in a transverse direction;
• a port for injecting through each of the channels a sample material;
• a perpendicular waveguide portion for use in injecting light into the channels in a direction which is generally perpendicular to the orientation of the channels;
• means for measuring selected optical and/or electrical properties associated with an analyte in the sample material;
• and
• an electrical component in fluid communication with the channels to control movement of the analyte in the sample material through the plurality of parallel channels.