Selective irradiation of small target area in X-ray fluorescent spectroscopy
AssigneeOxford Instruments Analytical Oy
InventorsEsko Juhani Kantonen, Heikki Johannes Sipilä
Life of this patent
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Abstract
An X-ray fluorescence analyzer device comprises an X-ray source and a sample window. Between the X-ray source and the sample window there are a collimator plate with a plurality of microscopic pores and an annular plate comprising material essentially opaque to X-rays. The annular plate defines an area transparent to X-rays. The pores in said collimator plate let through collimated X-rays radiated by said X-ray source towards said sample window. The area transparent to X-rays in said annular plate spatially limits in a transverse direction a beam of X-rays radiated by said X-ray source towards said sample window.
Claims18
An arrangement for collimating a beam of incident X-rays in an X-ray fluorescence analyzer device, comprising:
- a collimator plate with a plurality of pores that penetrate through at least an essential part of the thickness of the collimator plate and that have a diameter smaller than 100 micrometers, and
- an annular plate comprising material essentially opaque to X-rays, said annular plate defining an area transparent to X-rays;
- wherein said collimator plate and said annular plate are adapted to be placed in said X-ray fluorescence analyzer device between an X-ray source and a sample, and wherein said plurality of pores in said collimator plate are adapted to let through at least a part of X-rays radiated by said X-ray source, and wherein edges of said area transparent to X-rays in said annular plate are adapted to spatially limit in a transverse direction a beam of X-rays radiated by said X-ray source, and wherein walls of at least some of said pores comprise a coating, the material of the coating being one of:
- iridium, ruthenium, osmium, platinum, gold.
An X-ray fluorescence analyzer device, comprising:
- an X-ray source,
- a sample window to be placed adjacent to a sample, and
- between the X-ray source and the sample window a collimator plate with a plurality of pores that penetrate through at least an essential part of the thickness of the collimator plate and that have a diameter smaller than 100 micrometers, and an annular plate comprising material essentially opaque to X-rays, said annular plate defining an area transparent to X-rays;
- wherein said plurality of pores in said collimator plate are adapted to let through at least a part of X-rays radiated by said X-ray source towards said sample window, and wherein edges of said area transparent to X-rays in said annular plate are adapted to spatially limit in a transverse direction a beam of X-rays radiated by said X-ray source towards said sample window, and wherein walls of at least some of said pores comprise a coating, the material of the coating being one of:
- iridium, ruthenium, osmium, platinum, gold.
An arrangement for collimating a beam of incident X-rays in an X-ray fluorescence analyzer device, comprising:
- a collimator plate with a plurality of pores that penetrate through at least an essential part of the thickness of the collimator plate and that have a diameter smaller than 100 micrometers, and
- an annular plate comprising material essentially opaque to X-rays, said annular plate defining an area transparent to X-rays;
- wherein said collimator plate and said annular plate are adapted to be placed in said X-ray fluorescence analyzer device between an X-ray source and a sample, and wherein said plurality of pores in said collimator plate are adapted to let through at least a part of X-rays radiated by said X-ray source, and wherein edges of said area transparent to X-rays in said annular plate are adapted to spatially limit in a transverse direction a beam of X-rays radiated by said X-ray source, and wherein said collimator plate is a germanium wafer with a plurality of anisotropically etched pores therethrough.
Dependencies are inferred from the claim text.