US 7,443,952 B2 · X-ray diffraction measurement method and X-ray diffraction apparatus

Abstract

Disclosed is an X-ray diffraction apparatus that irradiates a sample with X-ray emitted from an X-ray source by resting the X-ray using a divergence slit and detects diffracted X-ray generated from the sample using an X-ray detector. The divergence angle of the divergence slit is a fixed value, and the divergence slit is a slit that restricts the X-ray irradiation width in the sample width direction. The sample is arranged in a longitudinally-elongated manner in which its sample width is smaller than a standard sample width and its sample height is the same as a standard sample height. X-ray intensity calculated based on an output of the X-ray detector is compensated based on an effective divergence angle calculated based on the sample width to thereby obtain true X-ray intensity.

Claims17

Dependent claims

An X-ray diffraction measurement method that irradiates a sample with X-ray emitted from an X-ray source while restricting the X-ray using a divergence slit and detects diffracted X-ray generated from the sample using X-ray detector, wherein

the divergence angle of the divergence slit is a fixed value,
the divergence slit is a slit that restricts X-ray irradiation width in the sample width direction,
the sample is arranged in a longitudinally-elongated manner in which its sample width is smaller than a standard sample width and its sample height is the same as a standard sample height, and
X-ray intensity calculated based on an output of the X-ray detector is compensated based on an effective divergence angle calculated based on the sample width.

1 more element

An X-ray diffraction apparatus comprising:

an X-ray source for emitting X-ray;
a sample holder for supporting a sample;
a divergence slit for guiding X-ray emitted from the X-ray source to the sample by restring the divergence of the X-ray;
an X-ray detector for detecting diffracted X-ray generated from the sample;
an X-ray intensity calculator for calculating X-ray intensity based on an output signal of the X-ray detector, wherein
the divergence angle of the divergence slit is a fixed value,
the divergence slit is a slit that restricts X-ray irradiation width in the direction of the width of the sample supported by the sample holder,
the sample holder supports the sample in a longitudinally-elongated arrangement in which its sample width is smaller than a standard sample width and its sample height is the same as a standard sample height, and
the X-ray intensity calculator compensates X-ray intensity Iobs(θ) calculated based on an output of the X-ray detector based on an effective divergence angle calculated based on the sample width to thereby obtain true X-ray intensity Itru(θ).

6 more elements

Dependencies are inferred from the claim text.

X-ray diffraction measurement method and X-ray diffraction apparatus

Life of this patent

X-ray diffraction measurement method and X-ray diffraction apparatus

Life of this patent

Abstract

Claims17