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US 7,443,649 B2Granted
Ferroelectric capacitor
AssigneeRohm Co., Ltd.
InventorTakashi Nakamura
Life of this patent
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Abstract
A ferroelectric capacitor including a lower electrode, a ferroelectric layer and an upper electrode. A part of at least any one of the lower and upper electrodes is formed of a material selected from the group consisting of TiOx, TaOx, ReOx, WOx, IrO2, PtO2, RuOx, PdOx, and OsOx.
Claims4
A ferroelectric capacitor comprising:
- a lower electrode;
- a ferroelectric film formed on the lower electrode;
- and
- an upper electrode formed on the ferroelectric film:
- wherein a part of at least anyone of the lower and upper electrodes is formed of a material selected from the group consisting of TiOx, TaOx, WOx, and PdOx.
2 more elements
Dependencies are inferred from the claim text.