Micro-electro-mechanical-system two dimensional mirror with articulated suspension structures for high fill factor arrays

A micro-electro-mechanical-system (MEMS) mirror device, comprising:

• a mirror having a 2-dimensional rotational T-shaped hinge at a first end;
• a support structure connected to the mirror through the 2-dimensional rotational T-shaped hinge;
• whereby the mirror is rotatable about a first axis of rotation and a second torsional axis of rotation perpendicular to the first axis of rotation;
• and
• wherein the 2-dimensional rotational T-shaped hinge comprises:
• a first torsional spring having a first mounting point at a first end connected to the support structure and having a second end;
• a second torsional spring having a second mounting point at a first end connected to the support structure and having a second end, the second end of the first torsional spring being connected to the second end of the second torsional spring;
• a third torsional spring having a first end connected to the second ends of the first and second torsional springs and having a second end connected to the first end of the mirror;
• whereby the first torsional spring and the second torsional spring define the first axis of rotation between the first and second mounting points, and the third torsional spring defines the second torsional axis of rotation perpendicular to the first axis of rotation.