Coordinate transformation device for electrical signal connection

A coordinate transformation device for electrical signal connection, comprising:

• a contact assembly formed by use of a resin film to which a metal foil is attached to form a conductive pattern of an electrical conductor including a probe function on the resin film by etching the metal foil, and laminating a plurality of sheets of the resin film with the probe function, thereby to perform circuit inspection of semiconductor chips by bringing ends of the probes into contact with electrode pads of the semiconductor chips at a time;
• a first wiring group formed by use of a resin film to which a metal foil is attached to form a conductive pattern on the resin film by etching the metal foil, and providing the conductive pattern with input and output terminals protruding from the outer periphery of the resin film, in which an output terminal pitch of the probe is defined as an input terminal pitch and the output terminal has a pitch larger than the input terminal pitch in a first horizontal direction (y direction);
• and
• a second wiring group in which the output terminal pitch of the first wiring group is defined as the input terminal pitch and the output terminal has a pitch larger than the input terminal pitch in a second horizontal direction (x direction) perpendicular to the first horizontal direction,
• wherein the input terminal of the first wiring group corresponding to one of the probe output terminals includes at least two terminals independently movable in a yz plane, and
• when the probe output terminal and the input terminal of the first wiring group are contacted and conducted with each other, a wall surface of a first terminal of the input terminal of the first wiring group comes into contact with a side surface of the probe output terminal, and a wall surface of a second terminal comes into contact with a side surface on the opposite side of the probe output terminal.