Shield arrangement for a vacuum cell
AssigneeInficon GmbH
InventorsPer Björkman, Urs Wälchli, Hansjakob Hanselmann, Stanislav Duris, Martin Wüest
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AssigneeInficon GmbH
InventorsPer Björkman, Urs Wälchli, Hansjakob Hanselmann, Stanislav Duris, Martin Wüest
Estimating the term…
A shield arrangement for a vacuum measuring cell has a tubular shield housing encompassing a shield and an exit port for connection to a vacuum measuring cell and a connection opening for the object space to be measured. The shield is between the two openings and is implemented as a screw shield with spiral convolutions, its thread flange in the outer diameter being in contact on the inner wall of the shield housing such that a gas throughflow between the outer diameter of the thread flange and the inner wall is inhibited and is substantially forced into the spiral thread flight, and the exit port is on one side of the tubular section and the connection opening is on the other, opposite side and the screw shield is implemented such that in the axial line of vision the shield arrangement between the two openings is optically tight.
A vacuum measuring cell (15) with a shield arrangement (25) for performing a protective function by decreasing contamination of the vacuum measuring cell in order to increase service life of the measuring cell while ensuring high measuring precision and reproducibility of vacuum measurement, the vacuum measuring cell comprising:
Dependencies are inferred from the claim text.