Piezoelectric actuator
AssigneeDenso Corporation
InventorsToshiatsu Nagaya, Tatsuhiko Nonoyama, Masaya Nakamura, Yasuyoshi Saito, Hisaaki Takao, Takahiko Homma, Kazumasa Takatori
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AssigneeDenso Corporation
InventorsToshiatsu Nagaya, Tatsuhiko Nonoyama, Masaya Nakamura, Yasuyoshi Saito, Hisaaki Takao, Takahiko Homma, Kazumasa Takatori
Estimating the term…
A piezoelectric actuator 1 includes a piezoelectric element 2, which has a pair of electrodes formed on the surface of a piezoelectric ceramic member, as a drive source. The piezoelectric actuator 1 satisfies at least one of the following requirements (a) to (c): (a) the variation width WC in an apparent dynamic capacity C [F] due to a change in temperature should fall within ±11% over a specific temperature range from −30° C. to 80° C.; (b) the variation width WL in a displacement L [μm] due to a change in temperature should fall within ±14% over the specific temperature range from −30° C. to 80° C.; and (c) the variation width WL/C in a quotient L/C due to a change in temperature should fall within ±12% over the specific temperature range from −30° C. to 80° C., wherein C [F] denotes the apparent dynamic capacity and L [μm] denotes the displacement.
A piezoelectric actuator which comprises as a drive source a piezoelectric element in which a pair of electrodes have been formed on a surface of a piezoelectric ceramic member wherein when a voltage is applied to the piezoelectric actuator to drive the piezoelectric actuator under such a condition that the driving voltage have a constant amplitude at an electric field strength of 100 V/mm or more, the piezoelectric actuator satisfies at least one of the following requirements (a) to (c):
A piezoelectric actuator which comprises as a drive source a piezoelectric element in which a pair of electrodes have been formed on a surface of a piezoelectric ceramic member wherein when a voltage is applied to the piezoelectric actuator to drive the piezoelectric actuator under such a condition that the driving voltage have a constant amplitude at an electric field strength of 100 V/mm or more, the piezoelectric actuator satisfies at least one of the following requirements (j) to (l):
Dependencies are inferred from the claim text.