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US 7,443,019 B2Granted
Semiconductor device with conductor tracks between semiconductor chip and circuit carrier and method for producing the same
AssigneeInfineon Technologies AG
InventorsMichael Bauer, Alfred Haimerl, Angela Kessler, Joachim Mahler, Wolfgang Schober
Life of this patent
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Abstract
The invention relates to a semiconductor device with conductor tracks between a semiconductor chip and a circuit carrier, and to a method for producing the same. The conductor tracks extend from contact areas on the top side of the semiconductor chip to contact pads on the circuit carrier. The conductor tracks include an electrically conductive polymer in the semiconductor device.
Claims13
A semiconductor device comprising:
- a semiconductor chip including contact areas on a top side of the semiconductor chip;
- a circuit carrier including contact pads;
- and
- conductor tracks extending from the contact areas of the semiconductor chip to the contact pads of the circuit carrier, wherein the conductor tracks comprise an electrically conductive polymer including at least one of:
- polybenzimidazole, polyphenyl sulfide, polysulfones, and polysulfone phenyl sulfide.
2 more elements
A method for producing semiconductor devices with conductor tracks between semiconductor chips and a circuit carrier with a plurality of semiconductor device positions, the method comprising:
- producing a circuit carrier that includes a plurality of semiconductor device positions, contact pads and chip contact areas;
- applying a rear side of at least one semiconductor chip to at least one chip contact area in one of the semiconductor device positions, the semiconductor chip including contact areas on a top side of the semiconductor chip;
- selectively providing conductor tracks, the conductor tracks comprising an electrically conductive polymer, such that the conductor tracks extend from the contact areas on the top side of the semiconductor chip to the contact pads on the circuit carrier;
- embedding the semiconductor chip, the conductor tracks and at least part of the circuit carrier into a plastic housing composition;
- and
- electrolessly depositing a metal layer on the conductor tracks.
3 more elements
A method for producing semiconductor devices with conductor tracks between semiconductor chips and a circuit carrier with a plurality of semiconductor device positions, the method comprising:
- producing a circuit carrier that includes a plurality of semiconductor device positions, contact pads and chip contact areas;
- applying a rear side of at least one semiconductor chip to at least one chip contact area in one of the semiconductor device positions, the semiconductor chip including contact areas on a top side of the semiconductor chip;
- selectively providing conductor tracks, the conductor tracks comprising an electrically conductive polymer, such that the conductor tracks extend from the contact areas on the top side of the semiconductor chip to the contact pads on the circuit carrier, wherein selectively providing the conductor tracks comprises:
- laminating the electrically conductive polymer as a film onto the semiconductor chip and onto the circuit carrier;
- and forming the conductor tracks by patterning the circuit carrier via laser ablation;
- and
- embedding the semiconductor chip, the conductor tracks and at least part of the circuit carrier into a plastic housing composition.
4 more elements
A method for producing semiconductor devices with conductor tracks between semiconductor chips and a circuit carrier with a plurality of semiconductor device positions, the method comprising:
- producing a circuit carrier that includes a plurality of semiconductor device positions, contact pads and chip contact areas;
- applying a rear side of at least one semiconductor chip to at least one chip contact area in one of the semiconductor device positions, the semiconductor chip including contact areas on a top side of the semiconductor chip;
- selectively providing conductor tracks, the conductor tracks comprising an electrically conductive polymer, such that the conductor tracks extend from the contact areas on the top side of the semiconductor chip to the contact pads on the circuit carrier, wherein selectively providing the conductor tracks comprises:
- spraying a solution comprising the electrically conductive polymer onto the semiconductor chip and the circuit carrier;
- curing the electrically conductive polymer solution;
- and forming the conductor tracks via photolithographically patterning of the electrically conductive polymer;
- and
- embedding the semiconductor chip, the conductor tracks and at least part of the circuit carrier into a plastic housing composition.
5 more elements
A method for producing semiconductor devices with conductor tracks between semiconductor chips and a circuit carrier with a plurality of semiconductor device positions, the method comprising:
- producing a circuit carrier that includes a plurality of semiconductor device positions, contact pads and chip contact areas;
- applying a rear side of at least one semiconductor chip to at least one chip contact area in one of the semiconductor device positions, the semiconductor chip including contact areas on a top side of the semiconductor chip;
- selectively providing conductor tracks, the conductor tracks comprising an electrically conductive polymer, such that the conductor tracks extend from the contact areas on the top side of the semiconductor chip to the contact pads on the circuit carrier, wherein providing the conductor tracks comprises:
- applying a melt of the electrically conductive polymer to the semiconductor chip and the circuit carrier;
- cooling the electrically conductive polymer melt;
- and forming the conductor tracks via photolithographically patterning of the electrically conductive polymer;
- and
- embedding the semiconductor chip, the conductor tracks and at least part of the circuit carrier into a plastic housing composition.
5 more elements
A method for producing semiconductor devices with conductor tracks between semiconductor chips and a circuit carrier with a plurality of semiconductor device positions, the method comprising:
- producing a circuit carrier that includes a plurality of semiconductor device positions, contact pads and chip contact areas;
- applying a rear side of at least one semiconductor chip to at least one chip contact area in one of the semiconductor device positions, the semiconductor chip including contact areas on a top side of the semiconductor chip;
- selectively providing conductor tracks, the conductor tracks comprising an electrically conductive polymer, such that the conductor tracks extend from the contact areas on the top side of the semiconductor chip to the contact pads on the circuit carrier, wherein providing the conductor tracks comprises:
- applying a base layer, made of electrically conductive polymers with a minimal selected thickness, to the semiconductor chip and the circuit carrier;
- covering selected regions of the base layer, which are not to be coated by electroplating, with an insulation layer;
- forming conductor tracks via electrodeposition in the uncovered regions of the base layer;
- and removing the insulation layer and the base layer;
- and
- embedding the semiconductor chip, the conductor tracks and at least part of the circuit carrier into a plastic housing composition.
6 more elements
A method for producing semiconductor devices with conductor tracks between semiconductor chips and a circuit carrier with a plurality of semiconductor device positions, the method comprising:
- producing a circuit carrier that includes a plurality of semiconductor device positions, contact pads and chip contact areas;
- applying a rear side of at least one semiconductor chip to at least one chip contact area in one of the semiconductor device positions, the semiconductor chip including contact areas on a top side of the semiconductor chip;
- selectively providing conductor tracks, the conductor tracks comprising an electrically conductive polymer, such that the conductor tracks extend from the contact areas on the top side of the semiconductor chip to the contact pads on the circuit carrier, wherein providing the conductor tracks comprises one of liquid jet printing, stencil printing and screen printing;
- and
- embedding the semiconductor chip, the conductor tracks and at least part of the circuit carrier into a plastic housing composition.
2 more elements
A method for producing semiconductor devices with conductor tracks between semiconductor chips and a circuit carrier with a plurality of semiconductor device positions, the method comprising:
- producing a circuit carrier that includes a plurality of semiconductor device positions, contact pads and chip contact areas;
- applying a rear side of at least one semiconductor chip to at least one chip contact area in one of the semiconductor device positions, the semiconductor chip including contact areas on a top side of the semiconductor chip;
- selectively providing conductor tracks, the conductor tracks comprising an electrically conductive polymer, such that the conductor tracks extend from the contact areas on the top side of the semiconductor chip to the contact pads on the circuit carrier, wherein providing the conductor tracks comprises:
- applying a lower layer;
- electrically deactivating the lower layer so as to form an insulation layer that serves as a supporting or bridging layer for an upper layer;
- applying the upper layer made of electrically conductive polymers to the insulation layer;
- and patterning the upper layer to form the conductor tracks;
- and
- embedding the semiconductor chip, the conductor tracks and at least part of the circuit carrier into a plastic housing composition.
6 more elements
Dependencies are inferred from the claim text.