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US 7,442,970 B2Granted
Active photosensitive structure with buried depletion layer
AssigneeMicron Technology, Inc.
InventorsDmitri Jerdev, Nail Khaliullin
Life of this patent
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Abstract
An imager pixel has a photosensitive JFET structure having a channel region located above a buried charge accumulation region. The channel region has a resistance characteristic that changes depending on the level of accumulated charge in the accumulation region. During an integration period, incident light causes electrons to be accumulated inside the buried accumulation region. The resistance characteristic of the channel region changes in response to a field created by the charges accumulated in the accumulation region. Thus, when a voltage is applied to one side of the channel, the current read out from the other side is characteristic of the amount of stored charges.
Claims29
An imaging device comprising:
- a plurality of CMOS pixel cells each configured to output a readout signal and comprising a JFET photosensor formed in a substrate, said JFET photosensor for generating charges in response to applied light, said JFET photosensor comprising
- a charge accumulation region buried beneath a top surface of the substrate,
- a channel region located beneath said top surface of the substrate and overlying the charge accumulation region, said channel region having a changeable resistance dependent upon the charges in the accumulation region,
- a first contact for applying a voltage to said channel region, and
- a second contact for producing the readout signal based on the resistance of said channel region and indicating the amount of charges accumulated in the accumulation;
- and
- transistors for gating the readout signals from said CMOS pixel cells to a signal line.
4 more elements
A CMOS pixel sensor cell comprising:
- a JFET photosensor formed at least partially in a substrate, said JFET photosensor for generating charges in response to applied light, said JFET photosensor comprising:
- a charge accumulation region buried beneath a top surface of the substrate;
- a channel region located beneath the top surface of the substrate and overlying said charge accumulation region, said channel region having a resistance that changes in response to the amount of charge accumulated in said charge accumulation region;
- a first contact electrically connected to the channel region and for reading out a readout signal from said channel region, the readout signal representing a current flowing through the channel region of changing resistance and indicating the amount of charges accumulated in the accumulation region;
- and
- a transistor for draining the accumulated charges from said charge accumulation region of said CMOS pixel sensor cell to a drain region.
3 more elements
An array of pixel sensor cells comprising;
- a plurality of CMOS pixel sensor cells formed in a substrate, wherein at least one CMOS pixel sensor cell of said array comprises:
- a JFET photosensor for detecting light, said JFET photosensor comprising
- an accumulation region for accumulating charges generated in response to the light, said accumulation region being buried beneath a top surface of the substrate and being doped to a first conductivity type, and
- a channel region overlying said accumulation region and being doped to a second conductivity type, wherein said channel region extends to the top surface of the substrate and has a resistance that changes based on the amount of charges accumulated in said accumulation region, and wherein said accumulation region and said channel region form a photodiode for generating the charges in response to the light, said photodiode extending parallel to a current carrying direction of said channel region;
- and
- a reset transistor for driving said accumulation region of said CMOS pixel cell to a reset voltage.
3 more elements
An array of pixel sensor cells comprising:
- a plurality of CMOS pixel sensor cells formed in a substrate, wherein at least one CMOS pixel sensor cell comprises:
- a JFET photosensor comprising
- an accumulation region for accumulating charges generated in response to applied light, said accumulation region being buried beneath a top surface of the substrate and being doped to a first conductivity type,
- a channel region overlying said accumulation region and being doped to a second conductivity type, wherein said channel region has a resistance that changes based on the amount of charges accumulated in said accumulation region and outputs a readout signal during an integration period of the at least one CMOS pixel sensor cell, and
- a first and second terminal contact for generating the readout signal of said pixel, the readout signal representing said changing resistance of said channel region;
- and
- a reset transistor for resetting the charges accumulated in said accumulation region of said at least one CMOS pixel sensor cell.
4 more elements
An imaging system comprising:
- a processor;
- and
- an imaging device electrically coupled to said processor, said imaging device comprising a pixel array of CMOS pixel cells at least one CMOS pixel cell of said array comprising:
- a JFET photosensor for generating charges during an integration period, said JFET photosensor comprising
- an n-type accumulation region for accumulating the generated charges, said accumulation region comprising a first portion buried beneath a top surface of the substrate and a second portion extending to the top surface of the substrate,
- a p-type channel region overlying said first portion of said accumulation region and extending from said first portion of said accumulation region to the top surface of the substrate, wherein said channel region has a resistance that changes based on the amount of charges accumulated in said accumulation region,
- a first and a second terminal contact for generating a readout signal from said pixel cell, the readout signal representing the amount of charge stored in the accumulation region, and
- readout circuitry connected to at least one of said first and second terminal contacts for reading out the readout signal;
- and
- a reset transistor for resetting the accumulated charges in the accumulation region of the JFET photosensor.
7 more elements
A CMOS pixel cell comprising:
- a JFET photosensor comprising
- an accumulation region doped to a first conductivity type and formed in a substrate, the accumulation region for accumulating charges generated in response to light striking the accumulation region,
- a channel region doped to a second conductivity type, located in the substrate, and configured to output a readout signal indicating an amount of the charges in said accumulation region, and
- a depletion region located between the channel region and the accumulation region, such that a varying thickness of the depletion region changes a resistance of the channel region during and in response to the accumulation of charges within said accumulation region;
- and
- a reset transistor comprising a gate arranged over a surface of said substrate, said reset transistor for driving said accumulation region of said CMOS pixel cell to a reset voltage.
3 more elements
Dependencies are inferred from the claim text.