Faraday assembly of ion implantation apparatus

A Faraday assembly of an ion implantation apparatus comprising:

• a Faraday cup disposed in a vacuum chamber of the apparatus;
• a driving shaft extending outwardly from the vacuum chamber, the Faraday cup being connected to the driving shaft in the vacuum chamber;
• a ball screw including a ball nut, and a lead screw extending through the ball nut and mating therewith such that rotation of the lead screw relative to the ball nut causes the ball nut to translate along the lead screw;
• a carrier constituted by the ball nut of the ball screw, the driving shaft being fixed to the carrier so as to move therewith when the ball nut translates along the lead screw;
• a motor operatively connected to the ball screw so as to rotate the lead screw relative to the ball nut, whereby the driving shaft can be moved via the carrier in a first direction in which the driving shaft is extended further into the vacuum chamber and a second direction in which the driving shaft is drawn out of the vacuum chamber so as to reposition the Faraday cup within the vacuum chamber;
• and
• a spring supported in the assembly so as to exert a biasing force on the carrier that acts in said second direction as the driving shaft is moved via the carrier in said second direction.

A Faraday assembly of an ion implantation apparatus comprising:

• a Faraday cup disposed in a vacuum chamber of the apparatus;
• a driving shaft extending outwardly from the vacuum chamber, the Faraday cup being connected to the driving shaft in the vacuum chamber;
• a motor operatively connected to the driving shaft so as to move the driving shaft in a first direction in which the driving shaft is extended further into the vacuum chamber and a second direction in which the driving shaft is drawn out of the vacuum chamber, whereby the Faraday cup can be advanced or retreated in the vacuum chamber;
• and
• auxiliary power means for exerting a force, acting on the driving shaft in said second direction, when the driving shaft is moved by the motor in said second direction.