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US 7,442,933 B2Granted
Bolometer having an amorphous titanium oxide layer with high resistance stability
OwnerAlice L. Lininventor
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Abstract
A bolometer is provided for use in an infrared imager. The bolometer comprises a substrate and a TiOx layer formed over the substrate. The TiOx layer has a resistance responsive to temperature. The x value of the TiOx layer is in the range of 1.68 to 1.95.
Claims1
A bolometer for use in an infrared imager, comprising:
- a substrate;
- and
- a TiOx layer formed over the substrate, the TiOx layer having a resistance responsive to temperature, where x is in the range of 1.68 to 1.95,
- wherein the TiOx layer is heated at a predetermined temperature in a range of 300° C. to 420° C. for a predetermined period in a range of 5 to 20 minutes such that the TiOx layer has a substantially constant resistance stability.
1 more element
Dependencies are inferred from the claim text.