Method for correcting distortions in electron backscatter diffraction patterns
AssigneeOxford Instruments Analytical Oy
InventorCheng Tsien Chou
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Abstract
A method is provided for correcting magnetic field distortions in an electron backscatter diffraction (EBSD) pattern. An EBSD pattern is firstly generated from a sample placed within an electron microscope. A predetermined representation of a magnetic field in the microscope is used to calculate the trajectories of electrons in the microscope, for different emergence angles. A corrected EBSD pattern is then calculated using the calculated trajectories, the corrected EBSD pattern representing the EBSD pattern if the microscope magnetic field were substantially absent.
Claims22
A method for correcting magnetic field distortions in an electron backscatter diffraction (EBSD) pattern, comprising the steps of:
- obtaining an EBSD pattern generated from a sample placed within an electron microscope;
- calculating the trajectories of electrons in the microscope, for different emergence angles, in accordance with a predetermined representation of a magnetic field in the microscope;
- and
- calculating a corrected EBSD pattern using the calculated trajectories, the corrected EBSD pattern representing the EBSD pattern if the microscope magnetic field were substantially absent.
A computer program disposed on a computer readable medium for correcting magnetic field distortions in an electron backscatter diffraction pattern, said program comprising:
- a means for obtaining an actual electron backscatter diffraction pattern generated from a sample placed within an electron microscope;
- a means for calculating trajectories of electrons in said electron microscope, for different emergence angles, in accordance with a predetermined representation of a magnetic field in said electron microscope;
- and a means for calculating a corrected electron backscatter diffraction pattern using said trajectories of electrons and said actual electron backscatter diffraction pattern, the corrected electron backscatter diffraction pattern representing a theoretical electron backscatter diffraction pattern from said sample in said microscope with said magnetic field substantially absent.
Dependencies are inferred from the claim text.