Charged particle beam apparatus
AssigneeHitachi High-Technologies Corporation
InventorTsuyoshi Ohnishi
Life of this patent
Estimating the term…
Abstract
When a sample includes repeated cells, a scale pattern corresponding to the repeated cells is generated. Next, the scale pattern generated is superimposed on the image of the repeated cells of the sample, thereby identifying a destination cell. Moreover, disposition of the repeated cells of the sample is determined based on positions of at least three ends of the repeated cells. Then, the position of the destination cell is identified from this disposition of the repeated cells. Furthermore, a zoom image is generated by a combination of a zoom based on beam deflection function and a zoom based on software. Then, the image shift is performed by software without displacing a sample stage.
Claims21
A charged particle beam apparatus, comprising:
- an irradiation system for irradiating a sample with a charged particle beam,
- a deflection control system for deflecting said charged particle beam,
- a detector for detecting a secondary-particle signal emitted from said sample,
- an image generation unit for generating a scanning-ion-microscope image of said sample from a signal sent from said detector,
- a display apparatus for displaying said image generated by said image generation unit, and
- an input apparatus for inputting an instruction from a user, wherein
- said deflection control system has beam deflection point resolution which is larger than display resolution by said display apparatus, and, when said sample includes repeated cells,
- said image generation unit generates a scale pattern corresponding to said repeated cells, and superimposes said scale pattern on an image of said repeated cells of said sample, thereby identifying a destination cell inputted from said input apparatus.
A charged particle beam apparatus, comprising:
- an irradiation system for irradiating a sample with a charged particle beam,
- a deflection control system for deflecting said charged particle beam,
- a detector for detecting a secondary-particle signal emitted from said sample,
- an image generation unit for generating an image of said sample from a signal sent from said detector,
- a display apparatus for displaying said image generated by said image generation unit, and
- an input apparatus for inputting an instruction from a user, wherein
- said deflection control system has beam deflection point resolution which is larger than display resolution by said display apparatus, and, when said sample includes repeated cells,
- said image generation unit identifies a destination cell from disposition number of said repeated cells of said sample in longitudinal and transverse directions and position of said destination cell, said disposition number and said position being inputted from said input apparatus.
A method of detecting a specific cell by using a charged particle beam apparatus, said method comprising the steps of:
- irradiating a sample with a charged particle beam,
- deflecting said charged particle beam,
- detecting a secondary-particle signal emitted from said sample,
- generating a scanning-ion-microscope image of said sample from said secondary-particle signal,
- generating a scale pattern corresponding to repeated cells when said sample includes said repeated cells, and
- identifying a destination cell by superimposing said scale pattern on a scanning-ion-microscope image of said repeated cells of said sample.
A method of detecting a specific cell by using a charged particle beam apparatus, said method comprising the steps of:
- irradiating a sample with a charged particle beam,
- deflecting said charged particle beam,
- detecting a secondary-particle signal emitted from said sample,
- generating a scanning-ion-microscope image of said sample from said secondary-particle signal,
- determining disposition of repeated cells of said sample when said sample includes said repeated cells, said disposition being determined based on positions of at least three ends of said repeated cells of said sample, and
- identifying position of a destination cell from said disposition of said repeated cells.
Dependencies are inferred from the claim text.