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AssigneeSII NanoTechnology Inc.
InventorsMasatoshi Yasutake, Takuya Nakaue, Kazutoshi Watanabe, Osamu Takaoka, Atsushi Uemoto, Naoya Watanabe, Yoshiteru Shikakura
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The present invention provides a working method using a scanning probe which can enhance a working speed and prolong a lifetime of the probe. The present invention provides the working method using a scanning probe which works a sample by performing the relative scanning of a probe supported on a cantilever on the sample at a predetermined scanning speed. The working method can work the object to be worked while forcibly and relatively vibrating the probe in the direction orthogonal to or parallel to a working surface of the sample at low frequency of 100 to 1000 Hz.
A working method using a scanning probe which works an object to be worked by performing relative scanning of a probe which is supported on a distal end of a cantilever on the object to be worked at a predetermined speed, wherein
A working method using a scanning probe which works an object to be worked by performing relative scanning of a probe which is supported on a distal end of a cantilever on the object to be worked at a predetermined speed, wherein
A working method using a scanning probe which works an object to be worked by performing relative scanning of a probe which is supported on a distal end of a cantilever on the object to be worked at a predetermined speed, wherein
Dependencies are inferred from the claim text.