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AssigneeJPK Instruments AG
InventorsDetlef Knebel, Matthias Amrein, Klaus Dreisewerd
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The invention relates to a combined method in which a high-resolution image of a sample surface is recorded by means of scanning force microscopy and the locally high-resolution, chemical nature (which is correlated with this) of the sample surface is measured by means of mass spectroscopy. The surface is chemically analyzed on the basis of laser desorption of a restricted surface area. For this purpose, the surface is illuminated in a pulsed form at each point of interest using the optical near-field principle. The optical near-field principle guarantees analysis with a position resolution which is not diffraction-limited. A hollow tip of the measurement probe that is used allows unambiguous association between the chemical analysis and a selected surface area. The highly symmetrical arrangement allows good transmission of the molecular ions that are produced.
An apparatus for a scanning microscope, in particular a scanning force microscope, comprising a measurement probe which defines a near field, and having a scanning unit which allows the measurement probe to move relative to a sample in all three spatial directions, in conjunction with a mass spectrometer with an ionization unit, an extraction unit and an analysis unit, wherein the measurement probe has a hollow tip so that the near field of the measurement probe can be used by the ionization unit in such a way that ions are formed only in the near field of the measurement probe, and the shape of the measurement probe allows an essentially axially symmetrical field distribution of the extraction unit with respect to the axis of the analysis unit.
A method for high-resolution examination of a measurement sample using a combined scanning probe microscope, in particular a scanning force microscope, wherein the scanning probe microscope is first of all used to record an image of the measurement sample, in particular of the topography of the measurement sample, and wherein a mass spectrometer is then used for destructive, chemical characterization of at least subareas of sections of the measurement sample which are covered by the image,
An apparatus for a scanning microscope, comprising a measurement probe which defines a near field and a scanning unit which allows the measurement probe to move relative to a sample in all three spatial directions in conjunction with a mass spectrometer with an ionization unit, an extraction unit and an analysis unit, wherein the measurement probe has a hollow tip so that the near field of the measurement probe can be used by the ionization unit such that ions are formed only in the near field of the measurement probe, and a shape of the measurement probe allows an essentially axially symmetrical field distribution of the extraction unit with respect to an axis of the analysis unit.
A method for high-resolution examination of a measurement sample using a combined scanning probe microscope, comprising the steps of:
Dependencies are inferred from the claim text.