Method for producing a semiconductor device and resulting device

A method for producing a semiconductor device comprising a plurality of groups consisting of a source, drain and gate contact, or a plurality of groups of an emitter, base and collector contact wherein the respective types of contact of said groups are interconnected to a common gate, drain and source or base, collector, and emitter contact, said method comprising the steps of:

• providing a first substrate, comprising on its front side a semiconductor layer, the semiconductor layer comprising on a front side a plurality of gate or base contacts, each gate contact lying in between source and drain ohmic contacts, or each base contact lying in between emitter and collector ohmic contacts,
• removing the first substrate from the semiconductor layer, to expose the backside of the semiconductor layer,
• after the step of removing the first substrate, etching vias through a backside of said semiconductor layer, wherein vias are produced directly on top of each ohmic contact of at least one type, to thereby expose said ohmic contacts of at least one type,
• producing on the backside of said semiconductor layer an interconnecting contact layer to provide an interconnect between said source-gate-drain contact groups or emitter-base-collector contact groups.