Method for constructing contact formations
AssigneeIntel Corporation
InventorsValery M. Dubin, Tzuen-Luh Huang, Ming Fang, Kevin J. Lee, Yuehai Liang, Margherita Chang
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AssigneeIntel Corporation
InventorsValery M. Dubin, Tzuen-Luh Huang, Ming Fang, Kevin J. Lee, Yuehai Liang, Margherita Chang
Estimating the term…
According to one aspect of the invention, a method for forming contact formations is provided. A substrate may be placed in an electrolytic solution. The substrate may have an exposed conductive portion and the electrolytic solution may include a plurality of metallic ions and an accelerator. The accelerator may include at least one of bis-(sodium sulfopropyl)-disulfide and 3-mercapto-1-propanesulfonic acid-sodium salt. A voltage may be applied across the electrolytic solution and the conductive portion of the substrate to cause the metallic ions to be changed into metallic particles and deposited on the conductive portion. The electrolytic solution may also include a protonated organic additive. The electrolytic solution may also include an acid and a surfactant. The acid may include at least one of sulfuric acid, methane sulfonic acid, benzene sulfonic acid, and picryl sulfonic acid. The surfactant may include at least one of polyethylene glycol and polypropylene glycol.
A method comprising:
A method for forming contact formations on a semiconductor substrate comprising:
A method for forming contact formations on a semiconductor substrate comprising:
A method comprising:
A method for forming contact formations on a semiconductor substrate comprising:
A method for forming contact formations on a semiconductor substrate comprising:
Dependencies are inferred from the claim text.