Electrolytic processing apparatus and method

An electrolytic processing apparatus, comprising:

• a substrate holder for holding a substrate with its processing surface facing upward;
• a first electrode to make contact with the substrate for passing electricity to the processing surface of the substrate;
• an electrode head including a high resistance structure and a second electrode disposed above the high resistance structure, both disposed above the substrate holder, and a polishing surface facing the processing surface of the substrate held by the substrate holder;
• an electrolytic solution injection portion for injecting an electrolytic solution between the processing surface of the substrate held by the substrate holder and the second electrode;
• a relative movement mechanism for moving the substrate holder and the electrode head relative to each other such that, during electroplating of the processing surface of the substrate, the substrate holder and the electrode head are arranged to provide a space between the processing surface of the substrate and the polishing surface, and such that, during electrolytic etching of the processing surface of the substrate, the substrate holder and the electrode head are arranged so that the polishing surface rubs the processing surface of the substrate;
• a press mechanism including a compression spring arranged to apply a continuous elastic force between the relative movement mechanism and the electrode head so as to press the polishing surface of the electrode head against the substrate held by the substrate holder;
• and
• a power source for applying a voltage between the first electrode and the second electrode, the power source being capable of selectively switching the direction of electric current such that, during electroplating of the processing surface of the substrate, the first electrode serves as a cathode and the second electrode serves as an anode, and such that, during electrolytic etching of the processing surface of the substrate, the first electrode serves as an anode and the second electrode serves as a cathode;
• wherein the relative movement mechanism includes a pivot arm operable to move vertically, the press mechanism further including a first plate attached to the pivot arm, and a second plate connected to the first plate by a stopper for guiding movement of the second plate relative to the first plate, the compression spring being arranged between the first plate and the second plate.