Chemical mechanical polishing pad
AssigneeJsr Corporation
InventorsHiroyuki Miyauchi, Hiroshi Shiho, Nobuo Kawahashi
Life of this patent
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Abstract
A chemical mechanical polishing pad having a face for polishing an object to be polished, a non-polishing face opposite to the face and a side face for interconnecting these faces and including the pattern of recessed portions which are formed on the non-polishing face and are open to the non-polishing face but not on the side face.
Claims8
A chemical mechanical polishing pad having a face for polishing an object to be polished, a non-polishing face opposite to the polishing face and a side face for interconnecting said polishing and non-polishing faces and including a pattern of first recessed portions which are formed on the non-polishing face, are open to the non-polishing face and are located exclusive of the side face, and which further comprises a circular or polygonal recessed portion, which does not form the pattern, in a center portion of said non-polishing face wherein a double-coated adhesive tape is affixed to said non-polishing face thereby to form closed spaces of said first recess portions between said double-coated adhesive tape and said non-polishing face and wherein said first recessed portions do not extend to said polishing face.
A chemical mechanical polishing pad having a face for polishing an object to be polished, a non-polishing face opposite to the face and a side face for interconnecting said polishing and non-polishing faces and including a pattern of first recessed portions which are formed on the non-polishing face, are open to the non-polishing face and are located exclusive of the side face, and which further comprises a circular or polygonal recessed portion, which does not form the pattern, in a center portion of said non-polishing face wherein a base layer is affixed to said non-polishing face thereby to form closed spaces of said first recess portions between said base and said non-polishing face and wherein said first recessed portions do not extend to said polishing face.
Dependencies are inferred from the claim text.