Visual wear confirmation polishing pad
AssigneeLSI Corporation
InventorsMichael J. Berman, Matthew R. Trattles
Life of this patent
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Abstract
A polishing pad having an upper layer with a first visual characteristic. The upper layer is adapted to erode against a pad conditioner at a uniform rate during a pad conditioning process. At least one lower layer with at least a second visual characteristic is disposed beneath the upper layer. The first visual characteristic is visually distinguishable from the second visual characteristic. The at least one lower layer is adapted to polish a substrate, where the visual distinguishability between the upper layer and the at least one lower layer provides a visual indication of whether the pad conditioning process has been accomplished in a uniform manner.
Claims20
A polishing pad comprising:
- at least two first layers having a first visual characteristic, the first layers adapted to polish a substrate, and
- at least two second layers having at least a second visual characteristic, where the first visual characteristic is visually distinguishable from the second visual characteristic, the second layers adapted to polish the substrate,
- the at least two first layers interleaved with the at least two second layers,
- where the visual distinguishability between the at least two first layers and the at least two second layers provides a visual indication of pad erosion.
A polishing pad comprising:
- at least two first layers having a first visual characteristic, the first layers adapted to polish a substrate,
- at least two second layers, the second layers having a second visual characteristic, where the first visual characteristic is visually distinguishable from the second visual characteristic, the second layers adapted to polish the substrate,
- the at least two first layers interleaved with the at least two second layers,
- where the visual distinguishability between the interleaved first and second layers provides a visual indication of pad erosion,
- a backing disposed below the plurality of interleaved first and second layers, and
- an adhesive layer disposed below the backing.
A polishing pad, comprising:
- at least two white layers adapted to polish a substrate, and
- at least two black layers adapted to polish the substrate,
- wherein the white layers are interleaved with the black layers.
Dependencies are inferred from the claim text.