Liquid-repellent member, nozzle plate, liquid-jet head using the same, and liquid-jet apparatus
AssigneeSeiko Epson Corporation
InventorTatsumi Nishijima
Life of this patent
Estimating the term…
Abstract
To provide a liquid-repellent member such as a nozzle plate having high liquid repellency and liquid-repellent durability, a liquid-jet head using the same, and a liquid-jet apparatus. A liquid-repellent member includes: an underlayer film which is provided on a surface of a base and contains silicon; and a liquid-repellent film which is provided on the underlayer film and is made of a silane coupling agent having a fluorocarbon group. In the liquid-repellent member, a intensity ratio of ions highest detected in fluorocarbon-based fragment ions to silicon ions is greater than or equal to 10 when the fluorocarbon-based fragment ions and the silicon ions are detected through measurement by a Time-of-Flight Secondary Ion Mass Spectrometer.
Claims7
A liquid-repellent member, comprising:
- an underlayer film which is provided on a surface of a base and contains silicon;
- and
- a liquid-repellent film which is provided on the underlayer film and is made of a silane coupling agent having a fluorocarbon group,
- wherein a intensity ratio of ions highest detected in fluorocarbon-based fragment ions to silicon ions is greater than or equal to 10, when the fluorocarbon-based fragment ions and the silicon ions are detected through measurement by a Time-of-Flight Secondary Ion Mass Spectrometer.
Dependencies are inferred from the claim text.