US 7,441,470 B2 · Strain gauge type sensor and strain gauge type sensor unit using the same

Abstract

A strain gauge type sensor and a strain gauge type sensor unit using the sensor are improved in sensitivity. In a strain gauge type sensor 1 for measuring at least one of multiaxial force, moment, acceleration, and angular acceleration, externally applied, diaphragms 15 and 16 different in thickness are formed at inner and outer edges of a substantially disk-shaped interconnecting portion 13 interconnecting a vicinity of an upper end of a force receiving portion 11 and a fixed portion 12 disposed around the force receiving portion 11. The thicknesses of the diaphragms 15 and 16 are determined such that strains at intersections of a straight line extending through an origin O with the diaphragms 15 and 16 are equal to each other. Strain gauges are disposed at the intersections of the straight line extending through the origin O with the diaphragms 15 and 16.

Claims16

Dependent claims

A strain gauge type sensor characterized in that the sensor comprises:

a strain generation body comprising a force receiving portion to which a force is applied, a fixed portion fixed to a supporting body, and an interconnecting portion that interconnects the force receiving portion and the fixed portion and in which strain is generated according to the force applied to the force receiving portion;
a first strain gauge disposed on the interconnecting portion of the strain generation body;
and
a second strain gauge disposed on the interconnecting portion at a position nearer to the fixed portion than the first strain gauge, and the interconnecting portion comprises:
a first diaphragm on which the first strain gauge is disposed;
a second diaphragm that is thinner than the first diaphragm on which the second strain gauge is disposed;
and
a connecting portion that is thicker than the first diaphragm and connects the first and second diaphragms to each other.

5 more elements

Dependencies are inferred from the claim text.

Strain gauge type sensor and strain gauge type sensor unit using the same

Life of this patent

Strain gauge type sensor and strain gauge type sensor unit using the same

Life of this patent

Abstract

Claims16