Measurement of properties of thin specimens based on experimentally acquired force-displacement data
AssigneeAgilent Technologies, Inc.
InventorsWarren C. Oliver, Erik G. Herbert
Life of this patent
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Abstract
A method and system are provided for obtaining force-displacement responses for a specimen or sample of material. The sample is supported with a spanning portion spanning in an environment between at least three points not in a line, wherein the points are fixed relative to each other, and wherein the spanning portion is capable of displacement relative to the points. An oscillating mechanical excitation at at least one frequency and at at least one known amplitude is applied to the spanning portion. In addition, at least one other mechanical excitation is also applied to the spanning portion independently of the oscillating mechanical excitation.
Claims41
A method for testing a thin specimen sample, the method comprising:
- supporting the sample with a spanning portion spanning in an environment between at least three points not in a line, wherein the points are fixed relative to each other, and wherein the spanning portion is capable of displacement relative to the points;
- applying an oscillating mechanical excitation at at least one frequency and at at least one known amplitude to the spanning portion;
- applying at least one other mechanical excitation to the spanning portion independently of the oscillating mechanical excitation;
- obtaining a first force-displacement response of the spanning portion of the sample relative to the applied oscillating mechanical excitation, and obtaining a second force-displacement response of the spanning portion of the sample relative to the at least one other mechanical excitation, wherein the first force-displacement response comprises an amplitude response and/or phase response relative to the applied oscillating mechanical excitation;
- and
- providing an indication of at least one mechanical property of the material from which the specimen is made based on the first force-displacement response.
An apparatus for ascertaining a property of a thin specimen sample comprising:
- a sample support system adapted to support a sample such that a spanning portion of the sample spans in an environment between at least three points not in a line, wherein the points are fixed relative to each other, and wherein the spanning portion is capable of displacement relative to the points;
- a tip adapted to apply mechanical excitation to the spanning portion of the sample;
- an actuator coupled to the support system and/or the tip to cause relative displacement of the tip and the support system to apply the mechanical excitation;
- a sensor configured to measure a mechanical response of the sample;
- and
- a controller operably coupled to the actuator and the sensor, the controller being configured to apply an oscillating mechanical excitation at at least one frequency and at at least one known amplitude to the spanning portion, and applying at least one other mechanical excitation to the spanning portion independently of the oscillating mechanical excitation, wherein the controller is configured to measure an amplitude response and/or phase response of the mechanical response of the sample relative to the applied oscillating mechanical excitation, and wherein the controller is configured to provide an indication of at least one mechanical property of the material from which the sample is made based on the first force-displacement response.
Dependencies are inferred from the claim text.