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US 7,441,440 B2Granted
Thin semiconductor film gas sensor device
AssigneeSACMI-Cooperativa Meccanici Imola-Soc. Coop. A.R.L.
InventorsGiorgio Sberveglieri, Elisabetta Comini, Guido Faglia, Camilla Baratto, Matteo Falasconi
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Abstract
The gas sensor device of the semiconductor film type comprises, on a single face of it, at least one gas sensor, a resistive heating film and pads for electrical contact of the sensors and of the resistive heating film; the heating element, the gas sensor film and the contact pads are made entirely by sputter deposition.
Claims17
A gas sensor device comprising:
- an insulating substrate having two faces;
- at least one separate sensor element having respective contact pads, each separate sensor element being made from thin semiconductor film and being applied to a single face of the substrate;
- a resistive heating element for heating to a predetermined temperature the substrate and the semiconductor film applied to it, the heating element being applied to said single face of the substrate and being equipped with respective contact pads for connection to an electrical power source, wherein the resistive element presents a serpentine pattern with a plurality of curves and wherein each semiconductor film is located in a curve of the serpentine.
A gas sensor device comprising:
- an insulating substrate having two faces;
- at least two separate sensors elements having respective contact pads, each separate sensor element being made from thin semiconductor film in contact with the respective contact pads and being applied to a single face of the substrate;
- a resistive heating element for heating to a predetermined temperature the substrate and the semiconductor film applied to it, the heating element presenting a serpentine pattern with a plurality of curves, being applied to said single face of the substrate and being equipped with respective contact pads for connection to an electrical power source;
- each contact pads for connection of the semiconductor films including a U-shaped element, whose branches, which are in contact with a respective semiconductor film, extend into the curves of the resistive heating element.
1 more element
Dependencies are inferred from the claim text.