Acousto-optic device and fabrication method of acousto-optic device
AssigneeFujitsu Limited
InventorsHiroshi Miyata, Yukito Tsunoda, Tadao Nakazawa, Yumi Nakazawa
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Abstract
An acousto-optic device is disclosed which can achieve both of suppression of secular change and prevention of device damage and can maintain a stabilized wavelength selection filtering operation. The acousto-optic device includes a substrate on which a SAW guide for guiding a surface acoustic wave and an optical waveguide for guiding an optical wave are provided. A pyro-electricity coping conductive wiring pattern is provided in a region of the substrate other than the SAW guide and neutralizes polarization charge generated on a surface of the substrate.
Claims10
A fabrication method of an acousto-optic device for forming an acousto-optic device on a substrate and which includes a surface acoustic wave propagation region for guiding a surface acoustic wave and an optical waveguide for guiding an optical wave, comprising:
- forming, on the substrate, an excitation electrode for exciting the surface acoustic wave;
- and
- forming a conductive neutralization wiring pattern in a region of the substrate other than the surface acoustic wave propagation region for neutralizing a polarization charge generated on a surface of the substrate, wherein the formed conductive neutralization wiring pattern comprises first and second patterns which are electrically connected and formed on an upper or rear surface of the substrate in such a manner that the first and second patterns sandwich in the surface acoustic wave propagation region from both sides with respect to a direction substantially perpendicular to a guiding direction of the optical wave.
A method comprising:
- forming an acousto-optic device on a substrate, wherein the acousto-optic device includes an excitation electrode that excites a surface acoustic wave, a surface acoustic wave propagation region that guides the excited surface acoustic wave and an optical waveguide that guides an optical wave;
- and
- forming a conductive neutralization wiring pattern in a region of the substrate other than the surface acoustic wave propagation region so that the conductive neutralization wiring pattern neutralizes a polarization charge generated on a surface of the substrate, wherein the conductive neutralization wiring pattern comprises first and second patterns which are electrically connected and formed on an upper or rear surface of the substrate so that the first and second patterns sandwich in the surface acoustic wave propagation region with respect to a direction substantially perpendicular to a direction in which the optical wave is guided by the optical waveguide.
Dependencies are inferred from the claim text.