Electric-magnetic field-generating element and assembling method for same
AssigneeICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
InventorsCarlo Salvesen, Ralf Degenhardt
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Abstract
An electric-magnetic field-generating element and a multipole element comprising a plurality of these field-generating elements providing for a stable charged particle beam are described. For some embodiments, the electric-magnetic field-generating element includes a pole piece, a yoke to which the pole piece is attached, at least one coil, a vacuum-tight container accommodating the coil(s), and a holder adapted to hold the vacuum-tight container such that the vacuum-tight container is spaced from the pole piece and the yoke.
Claims28
An electric-magnetic field-generating element, comprising:
- a pole piece;
- a yoke connected with the pole piece;
- at least one coil;
- a vacuum-tight container containing the at least one coil;
- and
- a holder adapted to hold the vacuum-tight container such that the vacuum-tight container is spaced from the pole piece and from the yoke.
A multipole element comprising a plurality of field-generating elements, each field-generating element comprising:
- a pole piece;
- a yoke connected with the pole piece;
- at least one coil;
- a vacuum-tight container containing the at least one coil;
- and
- a holder adapted to hold the vacuum-tight container such that the vacuum-tight container is spaced from the pole piece and from the yoke.
Dependencies are inferred from the claim text.