Thermal control plate for ion source
AssigneeVeeco Instruments Inc.
InventorsDavid M. Burtner, Scott A. Townsend, Daniel E. Siegfried
Life of this patent
Estimating the term…
Abstract
A thermal control plate is easily removable and replaceable in an ion source. The ion source has a removable anode assembly, including the thermal control plate, that is separable and from a base assembly to allow for ease of servicing consumable components of the anode assembly. The thermal control plate may support a gas distributor and an anode in the anode assembly. The thermal control plate may have a port for passing working gas from one side of the thermal control plate to the other. An interface surface on the thermal control plate may have a pattern of recesses to allow the working gas to disperse underneath the gas distributor.
Claims28
A thermal control plate for incorporation in an anode assembly of an ion source, the thermal control plate comprising
- a disk with a top surface and a bottom surface, wherein
- the disk defines a gas duct positioned to interface with a gas port in a base assembly of the ion source adjacent to the bottom surface of the disk and further positioned to exit the top surface of the disk underneath a gas distributor adjacent to the top surface of the disk within the anode assembly;
- the disk defines at least two inner apertures positioned to interface with at least two fastening bolts that attach the gas distributor to the top surface of the thermal control plate;
- the disk defines at least two outer apertures positioned to interface with at least two inner bolts extending between a pole piece of the anode assembly and the bottom surface of the disk;
- and
- the disk defines at least one channel within the top surface traveling from the gas duct to a position radially outward of the gas duct.
A thermal control plate for incorporation in an anode assembly of an ion source, the thermal control plate comprising
- a disk with a top surface and a bottom surface, wherein the disk defines
- a gas duct positioned to interface with a gas port in a base assembly of the ion source adjacent to the bottom surface of the disk and further positioned to exit the top surface of the disk underneath a gas distributor adjacent to the top surface of the disk within the anode assembly;
- six channels within the top surface extending radially from the gas duct to a position radially outward of the gas duct;
- a circular channel of an outer diameter slightly larger than a diameter of the gas distributor and an inner diameter slightly smaller than the diameter of the gas distributor positioned concentrically about the gas duct and intersecting each of the six channels to form six wedge-shaped islands;
- three inner apertures positioned within three of the six wedge-shaped islands nonadjacent to each other to interface with three fastening bolts that attach the gas distributor to the top surface of the thermal control plate;
- and
- four outer apertures positioned adjacent to an outer circumference of the disk to interface with four bolts extending between a pole piece of the anode assembly and the bottom surface of the disk.
A thermal control plate for incorporation in an anode assembly of an ion source, the thermal control plate comprising
- a disk with a top surface and a bottom surface, wherein
- the disk defines a gas duct positioned to interface with a gas port in a base assembly of the ion source adjacent to the bottom surface of the disk and further positioned to exit the top surface of the disk into a gas plenum underneath a gas distributor adjacent to the top surface of the disk within the anode assembly;
- and
- the disk defines at least two outer apertures positioned to interface with at least two inner bolts extending between a pole piece of the anode assembly and the bottom surface of the disk.
Dependencies are inferred from the claim text.