Applying a self-adaptive filter to a drifting process
AssigneeAdvanced Micro Devices, Inc.
InventorsJin Wang, Robert J. Chong, Christopher A. Bode, Si-Zhao J. Qin, Alexander J. Pasadyn
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Abstract
A method and an apparatus are provided for applying a self-adaptive filter to a drifting process. The method includes processing a workpiece, measuring an output characteristic of the processed workpiece and modifying a previous estimated process state based at least on the measured output characteristic. The method further includes estimating a next process state based at least on the modified previous estimated process state.
Claims26
A method, comprising:
- processing a workpiece using a processing tool;
- measuring an output characteristic of the processed workpiece;
- modifying a previously estimated state of the processing tool based at least on the measured output characteristic;
- estimating, using a filter, a next state of the processing tool based at least on the modified previously estimated state;
- and
- processing a workpiece based on the estimated next state of the processing tool.
An apparatus, comprising:
- an interface adapted to receive an output characteristic of a processed workpiece;
- and
- a control unit communicatively coupled to the interface, the control unit adapted to:
- modify a previously estimated processing-tool state based at least on the received output characteristic;
- determine, using a filter, a next processing-tool state based at least on the modified previously estimated state;
- and
- provide the determined next processing-tool state to process a workpiece.
An apparatus, comprising:
- means for processing a workpiece;
- means for measuring an output characteristic of the processed workpiece;
- and
- means for:
- modifying a previously estimated processing-tool state based at least on the measured output characteristic;
- providing the modified estimated state to a filter to determine a next processing-tool state, wherein the next processing-tool state is determined based at least on modified previously estimated state;
- and
- providing the determined next processing-tool state to process a workpiece.
An article comprising one or more machine-readable storage media containing instructions that when executed enable a processor to:
- receive a measured output characteristic of a processed workpiece;
- modify a previously estimated processing-tool state based at least on the received output characteristic;
- estimate a next processing-tool state based at least on the modified estimated state, wherein estimating the next processing-tool state comprises providing the modified estimated state to a filter to calculate the next processing-tool state;
- and
- provide the estimated next processing-tool state to process a workpiece.
A system, comprising:
- a processing tool adapted to process a workpiece;
- a controller adapted to:
- receive a measured output characteristic associated with the processed workpiece;
- modify a previous estimated process state of the processing tool based at least on the measured output characteristic;
- provide the modified previous estimated process state to a filter to calculate a next process state, wherein the next process state is calculated based at least on modified previous estimated process state;
- and
- provide the next process state to process a workpiece.
Dependencies are inferred from the claim text.