Thermal control system and method
AssigneeAdvanced Thermal Sciences Corp.
InventorsKenneth W. Cowans, William W. Cowans, Glenn W. Zubillaga, Isaac Millan
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AssigneeAdvanced Thermal Sciences Corp.
InventorsKenneth W. Cowans, William W. Cowans, Glenn W. Zubillaga, Isaac Millan
Estimating the term…
A system and method for controlling the temperature of a process tool uses the vaporizable characteristic of a refrigerant that is provided in direct heat exchange relation with the process tool. Pressurized refrigerant is provided as both condensed liquid and in gaseous state. The condensed liquid is expanded to a vaporous mix, and the gaseous refrigerant is added to reach a target temperature determined by its pressure. Temperature corrections can thus be made very rapidly by gas pressure adjustments. The process tool and the operating parameters will usually require that the returning refrigerant be conditioned and processed for compatibility with the compressor and other units, so that cycling can be continuous regardless of thermal demands and changes.
A method for correcting the pressure and enthalpy of a refrigerant used directly in thermal exchange relation with a thermal load which might heat or cool the refrigerant, comprising the steps of:
A method of varying the heat transfer properties of a two phase refrigerant to exchange thermal energy with a thermal load so as to heat or cool the load to a chosen temperature within a range, comprising the steps of:
Dependencies are inferred from the claim text.