# US 7,412,121 B2 · Nanophotonic integrated circuit and fabrication thereof > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 7,412,121 B2 - Document ID: US7412121B2 - Status: Granted - Kind: B2 - Application number: 11/335,110 - Filed: 2006-01-19 - Published: 2006-07-20 - Granted: 2008-08-12 - Earliest claimed: 2002-10-24 - Assignees: Applied Research and Photonics, Inc. - Inventors: Anis Rahman - Web page: https://patentgrep.com/patent/US7412121B2 ## CPC - G02B 6/12011: {characterised by the arrayed waveguides, e.g. comprising a filled groove in the array section} - G02B 6/1221: {made from organic materials} - H01S 3/0637: {Integrated lateral waveguide, e.g. the active waveguide is integrated on a substrate made by Si on insulator technology (Si/SiO2)} - H01S 3/1608: {erbium} - H01S 3/17: amorphous, e.g. glass - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS - H01S: DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL ## Abstract A class of nanophotonic integrated circuit (nPIC) has been disclosed that is a platform technology for fiberoptic communication and computing, that is fabricated from waveguides that are based on natural index contrast (NIC) principle. A multifunctional nPIC and its fabrication details have been described. The nPIC is also known as an “optical processor”. A novel nanomaterial “dendrimer” is highlighted as the key ingredient that enables the fabrication of the nPICs and its multifunctionality from the same basic process. Other nanomaterials such as spin-on glass, nano-silica sol, and a combination of any of these materials can also be used via the natural index contrast method. Several preferred embodiments of the nPIC are described. ## Claims ### Claim 1 A nanophotonic integrated circuit comprising: an input section, an amplifier section and a multiplexing/demultiplexing unit arranged on a substrate; the input section having a plurality of input waveguides, a coupler portion for coupling two of the plurality of input waveguides to the amplifier section, and a remaining input waveguides being connected to the multiplexing/demultiplexing unit, the amplifier section having a continuous folded waveguide connected at a first end to the coupler portion of the input waveguide and connected at a second end to the multipiexing/demultiplexing unit; the multiplexing/demultiplexing unit having a plurality of input/output waveguides, a slab waveguide, an array waveguide, and a reflective mirror; the plurality of input/output waveguides arranged for simultaneously inputting at least one signal to and outputting at least one signal for demultiplexing a multiplexed optical signal in to n different constituent wavelengths and for combining n input optical signals composed of n different constituent wavelengths in to a multiplexed signal; the slab waveguide having a first end and a second end, the first end coupled to the plurality of input/output waveguides to focus the at least one input signal to the second end, and the second end coupled to the array waveguide, for focusing the at least one output signal to the input/output interface through the first end; the array waveguide comprising a plurality of waveguides for coupling the one or more input signals, separating the one or more input signals into the n different constituent wavelengths and focusing the n different constituent wavelengths back on to the slab waveguide first end coupling to the input/output interface, the plurality of waveguides of the array waveguide being optically coupled at one end with the second end of the slab waveguide, and terminated at an opposing end of the array waveguide by the reflective mirror, each waveguide of said array waveguide having a predetermined path difference between successive waveguides, and the reflective mirror disposed at the opposing end of the array waveguide for reflecting the one or more signals. ### Claim 2 (depends on 1) The nanophotonic integrated circuit of claim 1, wherein also includes an external array interface portion attached to the input section, for connecting external fibers for input and output of signals to the nPIC. ### Claim 3 (depends on 1) The nanophotonic integrated circuit of claim 1, wherein the external array interface portion is precisely aligned to the input section and fixed to a side of the nanophotonic integrated circuit as part of a packaged module. ### Claim 4 (depends on 1) The nanophotonic integrated circuit of claim 1, wherein the amplifier section having a core comprised of a dendrimer material doped with amplifying ions. ### Claim 5 (depends on 4) The nanophotonic integrated circuit of claim 4, wherein the amplifying ions are selected from the group consisting of Er3+, Yt3+and similar rare earth ions. ### Claim 6 (depends on 1) The nanophotonic integrated circuit of claim 1, wherein the continuous folded waveguide is composed of a plurality of straight segments and a plurality of curved segments, wherein the curved segments have a predetermined minimum radius of curvature. ### Claim 7 (depends on 6) The nanophotonic integrated circuit of claim 6, wherein R is in the range of about 1 to 6 millimeters for dendrimer polymeric material and from about 4 to 5 mm for glassy materials. ### Claim 8 (depends on 1) The nanophotonic integrated circuit of claim 1, wherein each waveguide of the array waveguide is tapered at one end adjacent to the reflective mirror to couple light into and out of the array waveguide. ### Claim 9 (depends on 8) The nanophotonic integrated circuit of claim 8, wherein each waveguide of the array waveguide is tapered at an opposing end adjacent to the slab waveguide. ### Claim 10 (depends on 1) The nanophotonic integrated circuit of claim 1, also including a modulator array portion comprised of at least one modulator configured to modulate at least one input/output signals from the input/output waveguides, the modulator array being connected between the input/output waveguides and the multiplexing/demultiplexing unit. ### Claim 11 (depends on 10) The nanophotonic integrated circuit of claim 10, wherein the at least one modulator of the modulator array portion is an electro-optic phase modulator configured so that an electric excitation can be applied across the modulator over a predetermined length. ### Claim 12 (depends on 11) The nanophotonic integrated circuit of claim 11, wherein the electro- optic phase modulator includes a top electrode and a bottom electrode, the separation between the top and the bottom electrodes being within a range of about 2 to 8 microns. ### Claim 13 (depends on 10) The nanophotonic integrated circuit of claim 10, wherein the at least one modulator of the modulator array portion is a Mach-Zehnder (MZ) structure, wherein each MZ structure includes a pair of phase modulators arranged in parallel to produce amplitude modulation. ### Claim 14 (depends on 10) The nanophotonic integrated circuit of claim 10, wherein the modulators of the modulator array portion have a transmittance that can be controlled from a minimum power Pmin to a maximum power Pmax, and output power, Pout can be controlled by the applied voltage V according to the following equation: P out = P min + ( P max - P min ) · [ 1 2 + 1 2 ⁢ cos ⁢ { π ⁡ ( V - V 0 ) V π } ] where V0 is the voltage at peak power, Vπis the half-wave voltage, and V is the applied voltage. ### Claim 15 (depends on 10) The nanophotonic integrated circuit of claim 10, wherein the modulator array portion is comprised of a combination of electro-optic phase modulators and MZ amplitude modulators. ### Claim 16 (depends on 10) The nanophotonic integrated circuit of claim 10, wherein the modulator array portion is comprised of a plurality of MZ amplitude modulators, each MZ amplitude modulator corresponding to an output channel of the integrated circuit. ### Claim 17 (depends on 1) The nanophotonic integrated circuit of claim 1, wherein the input section, amplifier section and multiplexing/demultiplexing unit are comprised of a PAMAM dendrimer material suitable for guiding light in the range of approximately 1000 to 1600 nanometer range, the PAMAM dendrimer being selected from the group consisting of generation zero through generation 10. ### Claim 18 (depends on 1) The nanophotonic integrated circuit of claim 1, wherein the input section, amplifier section and multiplexing/demultiplexing unit are comprised of PAMAMOS dendrimer material suitable for guiding light in the range of approximately 1000 to 1600 nanometer range, the PAMAMOS dendrimer being selected from the group consisting of generation zero through generation 10. ### Claim 19 A nanophotonic integrated circuit comprising: an input section, an amplifier section and a splitter section arranged on a substrate; the input section configured to connect an input signal to the amplifier section, the amplifier section being configured to amplify the input signal and transmit the amplified input signal into an input of the splitter section; and the splitter section is coupled to a plurality of output channels configured to split the amplified input signal into a plurality of output signals of N branches, wherein the amplifier section is comprised of a dendrimer material. ### Claim 20 (depends on 19) The nanophotonic integrated circuit of claim 19, also including a modulator section, wherein the modulator section is configured to modulate the plurality of output signals. ### Claim 21 A method for tuning the wavelength ranges for amplification in an optical circuit, comprising: doping a dendrimer material with at least one of a preselected rare-earth ion; dissolving a salt of the preselected rare earth ion in a solution of the dendrimer and methanol; and amplifying light waves in a range which is characterized by the 1500-1600 nm range. ### Claim 22 (depends on 21) The method of claim 21, wherein the dendrimer is doped by using concentrations of Er3+, in the range of about 200 ppm to about 40,000 ppm. ### Claim 23 (depends on 21) The method of claim 21, wherein the rare earth ions are selected from the group consisting of Erbium for amplifying light waves in the 1500-1600 nm range, Neodymium (Nd3+) for amplifying light waves in the 1060 nm range, Praseodymium (Pr3+) for amplifying light waves in the 1250-1300 nm range, Thorium (Th3+) for amplifying light waves in the 1300-1400 nm range, Holmium (Ho3+) for amplifying light waves in the 1300-1400 nm range, and Terbium (Tb3+) for amplifying light waves in the 1400-1500 nm range.