# US 7,411,709 B2 · Beam processing system and beam processing method > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 7,411,709 B2 - Document ID: US7411709B2 - Status: Granted - Kind: B2 - Application number: 11/806,546 - Filed: 2007-06-01 - Published: 2008-01-03 - Granted: 2008-08-12 - Earliest claimed: 2006-06-02 - Assignees: Sen Corporation - Inventors: Takanori Yagita; Hisaki Izutani; Mitsukuni Tsukihara; Takashi Kuroda - Web page: https://patentgrep.com/patent/US7411709B2 ## CPC - H01J 37/20: Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support - H10P 72/7618: {characterised by a movable susceptor, stage or support, others than those only rotating on their own vertical axis, e.g. susceptors on a rotating carrousel} - H10P 72/7621: {characterised by supporting two or more semiconductor substrates} - H01J 2237/201: for mounting multiple objects - H01J 2237/20214: Rotation - H01J 2237/20228: Mechanical X-Y scanning - H01J 2237/31701: Ion implantation - Y10S 359/90: Methods - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - Y10S: TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS ## Abstract A beam processing system comprises a rotary disk mounted thereon with processing objects, a controller for controlling a reciprocating drive mechanism, and a beam width measuring unit for measuring a beam width of a processing beam. The controller sets an inner and an outer overscan position depending on a measured value of the beam width. The controller, based on the number of rotation of the rotary disk per unit time, a scan speed and the number of reciprocating scan times, a reversal start timing of the rotary disk at at least one of the inner and the outer overscan positions, and the measured value, controls the reciprocating drive mechanism so as to ensure an overlap region between a last and a current processing beam irradiation region on each of the processing objects, the overlap region overlapping at least half of the last processing beam irradiation region. ## Claims ### Claim 1 A beam processing system comprising a disk mounted thereon with a plurality of processing objects on the same circumference, a rotation drive mechanism for rotating said disk about a disk axis, a reciprocating drive mechanism for causing said disk, while rotating, to perform a reciprocating scan motion in a direction perpendicular to said disk axis within a stroke range defined by an inner overscan position and an outer overscan position, and a controller for controlling at least said reciprocating drive mechanism, said beam processing system causing said plurality of processing objects to pass through an irradiation position of a processing beam by rotation and the reciprocating scan motion of said disk, thereby irradiating the processing beam onto said plurality of processing objects, wherein said beam processing system further comprises a beam width measuring unit for measuring a beam width of said processing beam, said controller sets said inner overscan position and said outer overscan position depending on a measured value of said beam width or a predetermined value of said beam width, and said controller, based on the number of rotation of said disk per unit time, a scan speed and the number of reciprocating scan times of said reciprocating scan motion, a reversal start timing of said disk at at least one of said inner overscan position and said outer overscan position, and said measured value of the beam width or said predetermined value of the beam width, controls said reciprocating drive mechanism so as to ensure an overlap region between a last and a current processing beam irradiation region on each of said plurality of processing objects, said overlap region overlapping at least half of said last processing beam irradiation region. ### Claim 2 (depends on 1) The beam processing system according to claim 1, wherein said controller sets said inner overscan position and said outer overscan position depending on said measured value of the beam width and measured values of one end position and the other end position in a scan direction on a cross section of the processing beam. ### Claim 3 (depends on 1) The beam processing system according to claim 1, wherein said controller determines the scan speed and the number of reciprocating scan times of said reciprocating scan motion depending on a required total beam irradiation amount. ### Claim 4 (depends on 1) The beam processing system according to claim 1, wherein said controller ensures said overlap region between the last and current processing beam irradiation regions on each of said plurality of processing objects by regularly delaying per scan the reversal start timing of said disk at said at least one of said inner overscan position and said outer overscan position. ### Claim 5 (depends on 4) The beam processing system according to claim 4, further comprising a target detecting unit provided at a position adjacent to said disk for detecting an initial position detection target portion provided at a predetermined position of said disk while said disk is rotating, and outputting a detection signal, wherein said controller delays said reversal start timing based on said detection signal. ### Claim 6 (depends on 1) The beam processing system according to claim 1, wherein said controller ensures said overlap region between the last and current processing beam irradiation regions on each of said plurality of processing objects by delaying per scan the reversal start timing of said disk at said at least one of said inner overscan position and said outer overscan position by a delay time (T/Nx) derived by dividing a rotation period T of said disk by a value Nx set based on the number of reciprocating scan times N. ### Claim 7 (depends on 6) The beam processing system according to claim 6, further comprising a target detecting unit provided at a position adjacent to said disk for detecting an initial position detection target portion provided at a predetermined position of said disk while said disk is rotating, and outputting a detection signal, wherein said controller delays said reversal start timing based on said detection signal. ### Claim 8 (depends on 6) The beam processing system according to claim 6, wherein when said number of reciprocating scan times N is large, said controller sets said value Nx so as to increase by stages as the number of reciprocating times approaches the number N. ### Claim 9 (depends on 1) The beam processing system according to claim 1, wherein said controller ensures said overlap region between the last and current processing beam irradiation regions on each of said plurality of processing objects by randomly controlling, based on random numbers, the reversal start timing of said disk at said at least one of said inner overscan position and said outer overscan position. ### Claim 10 (depends on 1) The beam processing system according to claim 1, wherein said controller ensures said overlap region between the last and current processing beam irradiation regions on each of said plurality of processing objects by controlling the reversal start timing of said disk at said at least one of said inner overscan position and said outer overscan position, based on a programmed relationship of said number of rotation of said disk, said number of reciprocating scan times, said scan speed, and said measured value of the beam width. ### Claim 11 (depends on 1) The beam processing system according to claim 1, wherein said controller stores a relationship between said number of rotation of said disk and said number of reciprocating scan times as table data in a storage device in advance and ensures said overlap region between the last and current processing beam irradiation regions on each of said plurality of processing objects by controlling, based on said table data, the reversal start timing of said disk at said at least one of said inner overscan position and said outer overscan position. ### Claim 12 A beam processing method that causes a disk mounted thereon with a plurality of processing objects on the same circumference to rotate about a disk axis, causes said disk, while rotating, to perform a reciprocating scan motion in a direction perpendicular to said disk axis within a stroke range defined by an inner overscan position and an outer overscan position, and causes said plurality of processing objects to pass through an irradiation position of a processing beam by rotation and the reciprocating scan motion of said disk, thereby irradiating the processing beam onto said plurality of processing objects, said beam processing method comprising: measuring a beam width of said processing beam; setting said inner overscan position and said outer overscan position depending on a measured value of said beam width or a predetermined value of said beam width; and based on the number of rotation of said disk per unit time, a scan speed and the number of reciprocating scan times of said reciprocating scan motion, a reversal start timing of said disk at at least one of said inner overscan position and said outer overscan position, and said measured value of the beam width or said predetermined value of the beam width, controlling said reciprocating scan motion so as to ensure an overlap region between a last and a current processing beam irradiation region on each of said plurality of processing objects, said overlap region overlapping at least half of said last processing beam irradiation region. ### Claim 13 (depends on 12) The beam processing method according to claim 12, comprising setting said inner overscan position and said outer overscan position depending on said measured value of the beam width and measured values of one end position and the other end position in a scan direction on a cross section of the processing beam. ### Claim 14 (depends on 12) The beam processing method according to claim 12, comprising determining the scan speed and the number of reciprocating scan times of said reciprocating scan motion depending on a required total beam irradiation amount. ### Claim 15 (depends on 12) The beam processing method according to claim 12, comprising ensuring said overlap region between the last and current processing beam irradiation regions on each of said plurality of processing objects by regularly delaying per scan the reversal start timing of said disk at said at least one of said inner overscan position and said outer overscan position. ### Claim 16 (depends on 15) The beam processing method according to claim 15, comprising using, as a reference for delaying said reversal start timing, a detection signal obtained by detecting an initial position detection target portion provided at a predetermined position of said disk while said disk is rotating. ### Claim 17 (depends on 12) The beam processing method according to claim 12, comprising ensuring said overlap region between the last and current processing beam irradiation regions on each of said plurality of processing objects by delaying per scan the reversal start timing of said disk at said at least one of said inner overscan position and said outer overscan position by a delay time (T/Nx) derived by dividing a rotation period T of said disk by a value Nx set based on the number of reciprocating scan times N. ### Claim 18 (depends on 17) The beam processing method according to claim 17, comprising using, as a reference for delaying said reversal start timing, a detection signal obtained by detecting an initial position detection target portion provided at a predetermined position of said disk while said disk is rotating. ### Claim 19 (depends on 17) The beam processing method according to claim 17, comprising, when said number of reciprocating scan times N is large, setting said value Nx so as to increase by stages as the number of reciprocating times approaches the number N. ### Claim 20 (depends on 12) The beam processing method according to claim 12, comprising ensuring said overlap region between the last and current processing beam irradiation regions on each of said plurality of processing objects by randomly controlling, based on random numbers, the reversal start timing of said disk at said at least one of said inner overscan position and said outer overscan position. ### Claim 21 (depends on 12) The beam processing method according to claim 12, comprising ensuring said overlap region between the last and current processing beam irradiation regions on each of said plurality of processing objects by controlling the reversal start timing of said disk at said at least one of said inner overscan position and said outer overscan position, based on a programmed relationship of said number of rotation of said disk, said number of reciprocating scan times, said scan speed, and said measured value of the beam width. ### Claim 22 (depends on 12) The beam processing method according to claim 12, comprising preparing a relationship between said number of rotation of said disk and said number of reciprocating scan times as table data in advance and ensuring said overlap region between the last and current processing beam irradiation regions on each of said plurality of processing objects by controlling, based on said table data, the reversal start timing of said disk at said at least one of said inner overscan position and said outer overscan position. ### Claim 23 A beam processing system comprising a disk mounted thereon with a plurality of processing objects on the same circumference, a rotation drive mechanism for rotating said disk about a disk axis, a reciprocating drive mechanism for causing said disk, while rotating, to perform a reciprocating scan motion in a direction perpendicular to said disk axis within a stroke range defined by an inner overscan position and an outer overscan position, and a controller for controlling at least said reciprocating drive mechanism, said beam processing system causing said plurality of processing objects to pass through an irradiation position of a processing beam by rotation and the reciprocating scan motion of said disk, thereby irradiating the processing beam onto said plurality of processing objects, wherein said beam processing system further comprises a beam width measuring unit for measuring a beam width of said processing beam, said controller sets said inner overscan position and said outer overscan position depending on a measured value of said beam width or a predetermined value of said beam width, and said controller sets a scan speed of said reciprocating scan motion based on selection and setting of the number of rotation of said disk per unit time so that a distance of said reciprocating scan motion during one rotation of said disk becomes smaller than said measured value of the beam width or said predetermined value of the beam width and, after determining the number of reciprocating scan times, sets a reversal start timing of said reciprocating scan motion, thereby controlling said reciprocating drive mechanism so that irradiation of the processing beam is performed onto said plurality of processing objects so as to provide an overlap region overlapping at least half of a last irradiation region of the processing beam on each of said plurality of processing objects. ### Claim 24 A beam processing method that causes a disk mounted thereon with a plurality of processing objects on the same circumference to rotate about a disk axis, causes said disk, while rotating, to perform a reciprocating scan motion in a direction perpendicular to said disk axis within a stroke range defined by an inner overscan position and an outer overscan position, and causes said plurality of processing objects to pass through an irradiation position of a processing beam by rotation and the reciprocating scan motion of said disk, thereby irradiating the processing beam onto said plurality of processing objects, said beam processing method comprising: measuring a beam width of said processing beam; setting said inner overscan position and said outer overscan position depending on a measured value of said beam width or a predetermined value of said beam width; and setting a scan speed of said reciprocating scan motion based on selection and setting of the number of rotation of said disk per unit time so that a distance of said reciprocating scan motion during one rotation of said disk becomes smaller than said measured value of the beam width or said predetermined value of the beam width and, after determining the number of reciprocating scan times, setting a reversal start timing of said reciprocating scan motion, thereby controlling said reciprocating scan motion so that irradiation of the processing beam is performed onto said plurality of processing objects so as to provide an overlap region overlapping at least half of a last irradiation region of the processing beam on each of said plurality of processing objects. ### Claim 25 A beam processing system comprising a disk mounted thereon with a plurality of processing objects on the same circumference, a rotation drive mechanism for rotating said disk about a disk axis, a reciprocating drive mechanism for causing said disk, while rotating, to perform a reciprocating scan motion in a direction perpendicular to said disk axis within a stroke range defined by an inner overscan position and an outer overscan position, and a controller for controlling at least said reciprocating drive mechanism, said beam processing system causing said plurality of processing objects to pass through an irradiation position of a processing beam by rotation and the reciprocating scan motion of said disk, thereby irradiating the processing beam onto said plurality of processing objects, wherein said beam processing system further comprises a beam width measuring unit for measuring a beam width of said processing beam, said controller sets said inner overscan position and said outer overscan position depending on a measured value of said beam width or a predetermined value of said beam width, and said controller sets a scan speed of said reciprocating scan motion based on selection and setting of the number of rotation of said disk per unit time so that a distance of said reciprocating scan motion during one rotation of said disk becomes greater than said measured value of the beam width or said predetermined value of the beam width and, after selecting the number of reciprocating scan times, sets a reversal start timing of said reciprocating scan motion, thereby controlling said reciprocating drive mechanism so that irradiation of the processing beam is performed onto said plurality of processing objects so as to provide an overlap region overlapping at least half of a last irradiation region of the processing beam on each of said plurality of processing objects. ### Claim 26 A beam processing method that causes a disk mounted thereon with a plurality of processing objects on the same circumference to rotate about a disk axis, causes said disk, while rotating, to perform a reciprocating scan motion in a direction perpendicular to said disk axis within a stroke range defined by an inner overscan position and an outer overscan position, and causes said plurality of processing objects to pass through an irradiation position of a processing beam by rotation and the reciprocating scan motion of said disk, thereby irradiating the processing beam onto said plurality of processing objects, said beam processing method comprising: measuring a beam width of said processing beam; setting said inner overscan position and said outer overscan position depending on a measured value of said beam width or a predetermined value of said beam width; and setting a scan speed of said reciprocating scan motion based on selection and setting of the number of rotation of said disk per unit time so that a distance of said reciprocating scan motion during one rotation of said disk becomes greater than said measured value of the beam width or said predetermined value of the beam width and, after selecting the number of reciprocating scan times, setting a reversal start timing of said reciprocating scan motion, thereby controlling said reciprocating scan motion so that irradiation of the processing beam is performed onto said plurality of processing objects so as to provide an overlap region overlapping at least half of a last irradiation region of the processing beam on each of said plurality of processing objects.