# US 7,411,653 B2 · Lithographic apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 7,411,653 B2 - Document ID: US7411653B2 - Status: Granted - Kind: B2 - Application number: 10/966,110 - Filed: 2004-10-18 - Published: 2005-12-01 - Granted: 2008-08-12 - Earliest claimed: 2003-10-28 - Assignees: ASML Netherlands B.V. - Inventors: Christiaan Alexander Hoogendam; Bob Streefkerk; Johannes Catharinus Hubertus Mulkens; Erik Theodorus Maria Bijlaart; Aleksey Yurievich Kolesnychenko; Erik Roelof Loopstra; Jeroen Johannes Sophia Maria Mertens; Bernardus Antonius Slaghekke; Patricius Aloysius Jacobus Tinnemans; Helmar Van Santen - Web page: https://patentgrep.com/patent/US7411653B2 ## CPC - G03F 7/70866: {of mask or workpiece} - G03F 7/70341: {Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply (chemical composition of immersion liquids G03F7/2041)} - G03F 7/70808: {Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus} - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) ## Abstract Liquid is supplied to a space between the projection system and the substrate by an inlet. In an embodiment, an overflow region removes liquid above a given level. The overflow region may be arranged above the inlet and thus the liquid may be constantly refreshed and the pressure in the liquid may remain substantially constant. ## Claims ### Claim 1 A lithographic projection apparatus, comprising: a support structure configured to support a patterning device, the patterning device configured to pattern a beam of radiation according to a desired pattern; a substrate table configured to hold a substrate; a projection system configured to project the patterned beam onto a target portion of the substrate; and a liquid supply system configured to at least partly fill a space between the projection system and the substrate with a liquid to form a liquid reservoir, the liquid supply system comprising an overflow region configured to accept liquid from the liquid reservoir only when the liquid exceeds a certain level and to remove the liquid that exceeds the level. ### Claim 2 (depends on 1) The apparatus according to claim 1, further comprising an inlet configured to provide liquid to the space, wherein the overflow region is arranged above the inlet. ### Claim 3 (depends on 1) The apparatus according to claim 1, comprising a barrier configured to bound the liquid, an entrance to the overflow region being positioned on a side of the barrier opposite to a side of the barrier that faces the substrate table. ### Claim 4 (depends on 3) The apparatus according to claim 3, wherein the overflow region is arranged such that the liquid only flows into the overflow region when the liquid flows over the top of the barrier. ### Claim 5 (depends on 3) The apparatus according to claim 3, wherein the barrier forms part of the liquid supply system. ### Claim 6 (depends on 3) The apparatus according to claim 3, wherein the barrier forms a ridge having an area which is equal to or greater than an area of a final element of the projection system. ### Claim 7 (depends on 1) The apparatus according to claim 1, further comprising a gas tight member configured to seal the space above the liquid. ### Claim 8 (depends on 1) The apparatus according to claim 1, wherein the overflow region is arranged to maintain the pressure above the liquid at a substantially constant level. ### Claim 9 (depends on 1) The apparatus according to claim 1, further comprising a liquid confinement structure extending along at least a part of the boundary of the space between the projection system and the substrate, the liquid confinement structure and the projection system configured to form a capillary passage, the overflow region being arranged to remove liquid at the end of at least part of the capillary passage. ### Claim 10 (depends on 1) The apparatus according to claim 1, further comprising a liquid confinement structure extending along at least a part of the boundary of the space between the projection system and the substrate and an inlet configured to provide liquid to the space, the inlet being adjacent to an inner periphery of the liquid confinement structure and directed towards the target portion of the substrate. ### Claim 11 (depends on 1) The apparatus according to claim 1, wherein the liquid reservoir covers a smaller area than the substrate. ### Claim 12 A lithographic projection apparatus, comprising: a support structure configured to support a patterning device, the patterning device configured to pattern a beam of radiation according to a desired pattern; a substrate table configured to hold a substrate; a projection system configured to project the patterned beam onto a target portion of the substrate; a liquid supply system configured to at least partly fill a space between the projection system and the substrate with a liquid; and a barrier configured to bound the liquid in a gap, the barrier having a ridge, defining a level over which liquid will flow only when liquid exceeds the level, with an area equal to or larger than the area of a surface of a final element of the projection system configured to be in contact with the liquid, wherein the gap widens at the level. ### Claim 13 (depends on 12) The apparatus according to claim 12, wherein the barrier is part of the liquid supply system. ### Claim 14 (depends on 12) The apparatus according to claim 12, further comprising: a liquid confinement structure extending along at least a part of the boundary of the space between the projection system and the substrate, the liquid confinement structure and the projection system configured to form a capillary passage; and an outlet configured to remove liquid from the space and to remove the liquid at the end of at least part of the capillary passage. ### Claim 15 (depends on 12) The apparatus according to claim 12, further comprising: a liquid confinement structure extending along at least a part of the boundary of the space between the projection system and the substrate; and an inlet configured to provide liquid to the space, the inlet being adjacent to an inner periphery of the liquid confinement structure and directed towards the target portion of the substrate. ### Claim 16 (depends on 12) The apparatus according to claim 12, wherein the space covers a smaller area than the substrate. ### Claim 17 A lithographic projection apparatus comprising: a support structure configured to support a patterning device, the patterning device configured to pattern a beam of radiation according to a desired pattern; a substrate table configured to hold a substrate; a projection system configured to project the patterned beam onto a target portion of the substrate; and a liquid supply system configured to at least partly fill a space between the projection system and the substrate with a liquid to form a liquid reservoir, the liquid supply system comprising an inlet configured to provide liquid to the space, an overflow region configured to accept liquid from the liquid reservoir when the liquid exceeds a certain level, and an outlet configured to remove liquid that exceeds the certain level in a direction below the certain level, wherein the inlet is below the certain level. ### Claim 18 (depends on 17) The apparatus according to claim 17, further comprising an inlet configured to provide liquid to the space, wherein the overflow region is arranged above the inlet. ### Claim 19 (depends on 17) The apparatus according to claim 17, comprising a barrier configured to bound the liquid, an entrance to the overflow region being positioned on a side of the barrier opposite to a side of the barrier that faces the substrate table. ### Claim 20 (depends on 17) The apparatus according to claim 17, further comprising a liquid confinement structure extending along at least a part of the boundary of the space between the projection system and the substrate and an inlet configured to provide liquid to the space, the inlet being adjacent to an inner periphery of the liquid confinement structure and directed towards the target portion of the substrate.