Hollow laminated piezoelectric element and its manufacturing method

Abstract

A hollow laminated piezoelectric element having excellent durability and reliability and capable of obtaining a high output, and a method of manufacturing the hollow laminated piezoelectric element are provided. A hollow laminated piezoelectric element 1 comprises a ceramic laminate 10 that is formed by having alternately laminated piezoelectric layers 11 made of a piezoelectric material and internal electrode layers 21 and 22 having conductivity and by having a center through hole 14 formed to pass through the ceramic laminate 10 along a lamination direction. The ceramic laminate 10 has an internally terminated structure in the inside periphery having at least a portion of inside peripheral ends of the internal electrode layers 21 and 22 terminated within the ceramic laminate 10 so that at least a portion of the inside peripheral ends of the internal electrode layers 21 and 22 is not exposed to the inside peripheral surface 104 of the ceramic laminate 10. The inside peripheral surface 104 of the ceramic laminate 10 has inside peripheral slits 13 having trenches provided in the peripheral direction toward the inside of the piezoelectric layers 11 from the inside peripheral surface 104.

Dependencies are inferred from the claim text.